JPS5780546A - Detecting device for foreign substance - Google Patents

Detecting device for foreign substance

Info

Publication number
JPS5780546A
JPS5780546A JP15657680A JP15657680A JPS5780546A JP S5780546 A JPS5780546 A JP S5780546A JP 15657680 A JP15657680 A JP 15657680A JP 15657680 A JP15657680 A JP 15657680A JP S5780546 A JPS5780546 A JP S5780546A
Authority
JP
Japan
Prior art keywords
beltlike
approximately
irradiation parts
foreign substance
cost
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15657680A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6352696B2 (enrdf_load_stackoverflow
Inventor
Shoichi Tanimoto
Kazunori Imamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Nippon Kogaku KK filed Critical Nikon Corp
Priority to JP15657680A priority Critical patent/JPS5780546A/ja
Publication of JPS5780546A publication Critical patent/JPS5780546A/ja
Publication of JPS6352696B2 publication Critical patent/JPS6352696B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G01N21/8903—Optical details; Scanning details using a multiple detector array

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP15657680A 1980-11-07 1980-11-07 Detecting device for foreign substance Granted JPS5780546A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15657680A JPS5780546A (en) 1980-11-07 1980-11-07 Detecting device for foreign substance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15657680A JPS5780546A (en) 1980-11-07 1980-11-07 Detecting device for foreign substance

Publications (2)

Publication Number Publication Date
JPS5780546A true JPS5780546A (en) 1982-05-20
JPS6352696B2 JPS6352696B2 (enrdf_load_stackoverflow) 1988-10-19

Family

ID=15630775

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15657680A Granted JPS5780546A (en) 1980-11-07 1980-11-07 Detecting device for foreign substance

Country Status (1)

Country Link
JP (1) JPS5780546A (enrdf_load_stackoverflow)

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57128834A (en) * 1981-02-04 1982-08-10 Nippon Kogaku Kk <Nikon> Inspecting apparatus of foreign substance
JPS5982727A (ja) * 1982-11-04 1984-05-12 Hitachi Ltd 異物検出方法及びその装置
JPS59152626A (ja) * 1983-02-21 1984-08-31 Hitachi Ltd 異物検出装置
JPS59152625A (ja) * 1983-02-21 1984-08-31 Hitachi Ltd 異物検出装置
JPS6046558A (ja) * 1983-08-25 1985-03-13 Hitachi Ltd 縮小投影露光装置
JPS61104242A (ja) * 1984-10-29 1986-05-22 Hitachi Ltd 半導体ウェハ異物検査装置
JPS61104244A (ja) * 1984-10-29 1986-05-22 Hitachi Ltd 半導体ウエハ異物検出装置
JPS61117433A (ja) * 1984-11-14 1986-06-04 Hitachi Ltd 半導体ウェハ異物検出方法及びその装置
JPS62180758U (enrdf_load_stackoverflow) * 1986-05-08 1987-11-17
JPS63154948A (ja) * 1986-12-18 1988-06-28 Fujitsu Ltd 塵埃検出方法
JPS63204140A (ja) * 1986-10-23 1988-08-23 インスペックス・インコーポレーテッド 粒子検出方法および装置
JPS63285449A (ja) * 1987-05-18 1988-11-22 Nikon Corp 異物検査装置
JPH04143640A (ja) * 1990-07-27 1992-05-18 Hitachi Ltd 異物検査装置
US5410400A (en) * 1991-06-26 1995-04-25 Hitachi, Ltd. Foreign particle inspection apparatus
JP2007040972A (ja) * 2005-06-30 2007-02-15 Sunx Ltd 異物検出装置
JP2008032654A (ja) * 2006-07-31 2008-02-14 Sunx Ltd 異物検出装置
JP2008032649A (ja) * 2006-07-31 2008-02-14 Sunx Ltd 異物検出装置
WO2019167129A1 (ja) * 2018-02-27 2019-09-06 株式会社日立ハイテクノロジーズ 欠陥検出装置、欠陥検出方法および欠陥観察装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS498292A (enrdf_load_stackoverflow) * 1972-05-10 1974-01-24
JPS54101390A (en) * 1978-01-27 1979-08-09 Hitachi Ltd Foreign matter inspector
JPS5594145A (en) * 1979-01-12 1980-07-17 Hitachi Ltd Method of and device for inspecting surface of article
JPS55107942A (en) * 1979-02-13 1980-08-19 Matsushita Electric Works Ltd Inspecting method of plate

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS498292A (enrdf_load_stackoverflow) * 1972-05-10 1974-01-24
JPS54101390A (en) * 1978-01-27 1979-08-09 Hitachi Ltd Foreign matter inspector
JPS5594145A (en) * 1979-01-12 1980-07-17 Hitachi Ltd Method of and device for inspecting surface of article
JPS55107942A (en) * 1979-02-13 1980-08-19 Matsushita Electric Works Ltd Inspecting method of plate

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57128834A (en) * 1981-02-04 1982-08-10 Nippon Kogaku Kk <Nikon> Inspecting apparatus of foreign substance
JPS5982727A (ja) * 1982-11-04 1984-05-12 Hitachi Ltd 異物検出方法及びその装置
JPS59152626A (ja) * 1983-02-21 1984-08-31 Hitachi Ltd 異物検出装置
JPS59152625A (ja) * 1983-02-21 1984-08-31 Hitachi Ltd 異物検出装置
JPS6046558A (ja) * 1983-08-25 1985-03-13 Hitachi Ltd 縮小投影露光装置
JPS61104242A (ja) * 1984-10-29 1986-05-22 Hitachi Ltd 半導体ウェハ異物検査装置
JPS61104244A (ja) * 1984-10-29 1986-05-22 Hitachi Ltd 半導体ウエハ異物検出装置
JPS61117433A (ja) * 1984-11-14 1986-06-04 Hitachi Ltd 半導体ウェハ異物検出方法及びその装置
JPS62180758U (enrdf_load_stackoverflow) * 1986-05-08 1987-11-17
JPS63204140A (ja) * 1986-10-23 1988-08-23 インスペックス・インコーポレーテッド 粒子検出方法および装置
JPS63154948A (ja) * 1986-12-18 1988-06-28 Fujitsu Ltd 塵埃検出方法
JPS63285449A (ja) * 1987-05-18 1988-11-22 Nikon Corp 異物検査装置
JPH04143640A (ja) * 1990-07-27 1992-05-18 Hitachi Ltd 異物検査装置
US5410400A (en) * 1991-06-26 1995-04-25 Hitachi, Ltd. Foreign particle inspection apparatus
JP2007040972A (ja) * 2005-06-30 2007-02-15 Sunx Ltd 異物検出装置
JP2008032654A (ja) * 2006-07-31 2008-02-14 Sunx Ltd 異物検出装置
JP2008032649A (ja) * 2006-07-31 2008-02-14 Sunx Ltd 異物検出装置
WO2019167129A1 (ja) * 2018-02-27 2019-09-06 株式会社日立ハイテクノロジーズ 欠陥検出装置、欠陥検出方法および欠陥観察装置
JPWO2019167129A1 (ja) * 2018-02-27 2020-12-17 株式会社日立ハイテク 欠陥検出装置、欠陥検出方法および欠陥観察装置
US11802841B2 (en) 2018-02-27 2023-10-31 Hitachi High-Tech Corporation Defect detection device, defect detection method, and defect observation device

Also Published As

Publication number Publication date
JPS6352696B2 (enrdf_load_stackoverflow) 1988-10-19

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