JPS5779173A - Etching method for chromium film and chromium oxide film - Google Patents
Etching method for chromium film and chromium oxide filmInfo
- Publication number
- JPS5779173A JPS5779173A JP15625380A JP15625380A JPS5779173A JP S5779173 A JPS5779173 A JP S5779173A JP 15625380 A JP15625380 A JP 15625380A JP 15625380 A JP15625380 A JP 15625380A JP S5779173 A JPS5779173 A JP S5779173A
- Authority
- JP
- Japan
- Prior art keywords
- alcohol
- chromium
- film
- oxide film
- chromium oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 title abstract 3
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 title abstract 3
- 229910052804 chromium Inorganic materials 0.000 title abstract 3
- 239000011651 chromium Substances 0.000 title abstract 3
- 229910000423 chromium oxide Inorganic materials 0.000 title abstract 3
- 238000005530 etching Methods 0.000 title abstract 2
- 238000000034 method Methods 0.000 title 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 abstract 10
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 abstract 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 150000001298 alcohols Chemical class 0.000 abstract 1
- 125000000217 alkyl group Chemical group 0.000 abstract 1
- 125000002947 alkylene group Chemical group 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 235000011187 glycerol Nutrition 0.000 abstract 1
- 125000001424 substituent group Chemical group 0.000 abstract 1
- 238000001039 wet etching Methods 0.000 abstract 1
Landscapes
- ing And Chemical Polishing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15625380A JPS5779173A (en) | 1980-11-05 | 1980-11-05 | Etching method for chromium film and chromium oxide film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15625380A JPS5779173A (en) | 1980-11-05 | 1980-11-05 | Etching method for chromium film and chromium oxide film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5779173A true JPS5779173A (en) | 1982-05-18 |
JPH0115152B2 JPH0115152B2 (enrdf_load_stackoverflow) | 1989-03-15 |
Family
ID=15623736
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15625380A Granted JPS5779173A (en) | 1980-11-05 | 1980-11-05 | Etching method for chromium film and chromium oxide film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5779173A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4986463A (en) * | 1988-07-21 | 1991-01-22 | Productech Inc. | Flux effect by microexplosive evaporation |
JP2005120477A (ja) * | 2003-10-10 | 2005-05-12 | Asml Holding Nv | フッ化カルシウム物上に堆積されたクロムのエッチング方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4861342A (enrdf_load_stackoverflow) * | 1971-12-04 | 1973-08-28 | ||
JPS50765A (enrdf_load_stackoverflow) * | 1973-05-04 | 1975-01-07 | ||
JPS5068332A (enrdf_load_stackoverflow) * | 1973-10-19 | 1975-06-07 |
-
1980
- 1980-11-05 JP JP15625380A patent/JPS5779173A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4861342A (enrdf_load_stackoverflow) * | 1971-12-04 | 1973-08-28 | ||
JPS50765A (enrdf_load_stackoverflow) * | 1973-05-04 | 1975-01-07 | ||
JPS5068332A (enrdf_load_stackoverflow) * | 1973-10-19 | 1975-06-07 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4986463A (en) * | 1988-07-21 | 1991-01-22 | Productech Inc. | Flux effect by microexplosive evaporation |
JP2005120477A (ja) * | 2003-10-10 | 2005-05-12 | Asml Holding Nv | フッ化カルシウム物上に堆積されたクロムのエッチング方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0115152B2 (enrdf_load_stackoverflow) | 1989-03-15 |
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