JPS5775777A - Polishing machine - Google Patents
Polishing machineInfo
- Publication number
- JPS5775777A JPS5775777A JP55150111A JP15011180A JPS5775777A JP S5775777 A JPS5775777 A JP S5775777A JP 55150111 A JP55150111 A JP 55150111A JP 15011180 A JP15011180 A JP 15011180A JP S5775777 A JPS5775777 A JP S5775777A
- Authority
- JP
- Japan
- Prior art keywords
- thickness
- detector element
- temperature
- output
- cavity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To improve accuracy of thickness by installing in a cavity provided to the surface plate a thickness detector element which continuously monitors the thickness of item being processed, and by measuring accurate temperature near the coil. CONSTITUTION:A cavity 12 is provided to the upper surface plate 1, cut from above and reaching close to the facing surface of the lower surface plate 2. Removably installed in this cavity 12 is adetector 15 consisting of a thickness detector element 13 and a temperature detector element 14. Although an error is unavoidable for the thickness detector output due to heat generated by polishing operation, a counter measure is provided by the temperature detector element 14 which continuously monitors the temperature near the thickness detector. The output from the temperature detector is transferred through a compensator to the amplifier where it is treated with the output from the thickness detector element 13. Final output from the amplifier is a temperature compensated thickness value of reliable thickness accuracy.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55150111A JPS5775777A (en) | 1980-10-28 | 1980-10-28 | Polishing machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55150111A JPS5775777A (en) | 1980-10-28 | 1980-10-28 | Polishing machine |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5775777A true JPS5775777A (en) | 1982-05-12 |
Family
ID=15489722
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55150111A Pending JPS5775777A (en) | 1980-10-28 | 1980-10-28 | Polishing machine |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5775777A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0160860U (en) * | 1987-05-21 | 1989-04-18 | ||
JPH02126751U (en) * | 1989-03-24 | 1990-10-18 | ||
WO1999024219A1 (en) * | 1997-11-07 | 1999-05-20 | Nippon Pillar Packing Co., Ltd. | Rotary joint for fluid |
GB2380700A (en) * | 1998-10-16 | 2003-04-16 | Tokyo Seimitsu Co Ltd | Wafer polishing apparatus |
JP2016209951A (en) * | 2015-05-08 | 2016-12-15 | 株式会社ディスコ | Dry type polishing device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4852088A (en) * | 1971-11-04 | 1973-07-21 | ||
JPS5190095A (en) * | 1975-02-05 | 1976-08-06 |
-
1980
- 1980-10-28 JP JP55150111A patent/JPS5775777A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4852088A (en) * | 1971-11-04 | 1973-07-21 | ||
JPS5190095A (en) * | 1975-02-05 | 1976-08-06 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0160860U (en) * | 1987-05-21 | 1989-04-18 | ||
JPH02126751U (en) * | 1989-03-24 | 1990-10-18 | ||
WO1999024219A1 (en) * | 1997-11-07 | 1999-05-20 | Nippon Pillar Packing Co., Ltd. | Rotary joint for fluid |
US6234815B1 (en) | 1997-11-07 | 2001-05-22 | Nippin Pillar Packing Co., Ltd. | Rotary joint for fluid |
GB2380700A (en) * | 1998-10-16 | 2003-04-16 | Tokyo Seimitsu Co Ltd | Wafer polishing apparatus |
GB2380700B (en) * | 1998-10-16 | 2003-05-28 | Tokyo Seimitsu Co Ltd | Wafer polishing apparatus |
JP2016209951A (en) * | 2015-05-08 | 2016-12-15 | 株式会社ディスコ | Dry type polishing device |
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