JPS5190095A - - Google Patents
Info
- Publication number
- JPS5190095A JPS5190095A JP50014419A JP1441975A JPS5190095A JP S5190095 A JPS5190095 A JP S5190095A JP 50014419 A JP50014419 A JP 50014419A JP 1441975 A JP1441975 A JP 1441975A JP S5190095 A JPS5190095 A JP S5190095A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50014419A JPS5190095A (en) | 1975-02-05 | 1975-02-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50014419A JPS5190095A (en) | 1975-02-05 | 1975-02-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5190095A true JPS5190095A (en) | 1976-08-06 |
Family
ID=11860485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50014419A Pending JPS5190095A (en) | 1975-02-05 | 1975-02-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5190095A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5397789U (en) * | 1977-01-12 | 1978-08-08 | ||
| JPS53116094U (en) * | 1977-02-24 | 1978-09-14 | ||
| JPS5554174A (en) * | 1978-07-17 | 1980-04-21 | Sauerland Franz | Controller of machine that lap wafer |
| JPS5775777A (en) * | 1980-10-28 | 1982-05-12 | Supiide Fuamu Kk | Polishing machine |
| JPS57138575A (en) * | 1981-02-16 | 1982-08-26 | Hitachi Ltd | Grinding machine |
| JPS6131657U (en) * | 1984-07-31 | 1986-02-26 | 株式会社 三啓 | Automatic width measuring device for polishing machine |
| JPS61214970A (en) * | 1985-03-20 | 1986-09-24 | Sanyo Electric Co Ltd | Polishing device |
| US6402589B1 (en) | 1998-10-16 | 2002-06-11 | Tokyo Seimitsu Co., Ltd. | Wafer grinder and method of detecting grinding amount |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2971298A (en) * | 1958-10-03 | 1961-02-14 | Ibm | Workholder for a lapping machine |
| JPS4911119A (en) * | 1972-05-29 | 1974-01-31 |
-
1975
- 1975-02-05 JP JP50014419A patent/JPS5190095A/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2971298A (en) * | 1958-10-03 | 1961-02-14 | Ibm | Workholder for a lapping machine |
| JPS4911119A (en) * | 1972-05-29 | 1974-01-31 |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5397789U (en) * | 1977-01-12 | 1978-08-08 | ||
| JPS53116094U (en) * | 1977-02-24 | 1978-09-14 | ||
| JPS573713Y2 (en) * | 1977-02-24 | 1982-01-23 | ||
| JPS5554174A (en) * | 1978-07-17 | 1980-04-21 | Sauerland Franz | Controller of machine that lap wafer |
| JPS6327149B2 (en) * | 1978-07-17 | 1988-06-01 | Sauerland Franz | |
| JPS5775777A (en) * | 1980-10-28 | 1982-05-12 | Supiide Fuamu Kk | Polishing machine |
| JPS57138575A (en) * | 1981-02-16 | 1982-08-26 | Hitachi Ltd | Grinding machine |
| JPS6211986B2 (en) * | 1981-02-16 | 1987-03-16 | Hitachi Ltd | |
| JPS6131657U (en) * | 1984-07-31 | 1986-02-26 | 株式会社 三啓 | Automatic width measuring device for polishing machine |
| JPS61214970A (en) * | 1985-03-20 | 1986-09-24 | Sanyo Electric Co Ltd | Polishing device |
| US6402589B1 (en) | 1998-10-16 | 2002-06-11 | Tokyo Seimitsu Co., Ltd. | Wafer grinder and method of detecting grinding amount |