JPS577530A - Method of measuring surface temperature of object - Google Patents
Method of measuring surface temperature of objectInfo
- Publication number
- JPS577530A JPS577530A JP8159880A JP8159880A JPS577530A JP S577530 A JPS577530 A JP S577530A JP 8159880 A JP8159880 A JP 8159880A JP 8159880 A JP8159880 A JP 8159880A JP S577530 A JPS577530 A JP S577530A
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- black body
- plate
- wall
- radiometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012423 maintenance Methods 0.000 abstract 2
- 230000005855 radiation Effects 0.000 abstract 2
- 238000012935 Averaging Methods 0.000 abstract 1
- 238000010276 construction Methods 0.000 abstract 1
- 238000005259 measurement Methods 0.000 abstract 1
- 230000010355 oscillation Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/52—Radiation pyrometry, e.g. infrared or optical thermometry using comparison with reference sources, e.g. disappearing-filament pyrometer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Radiation Pyrometers (AREA)
Abstract
PURPOSE:To facilitate the maintenance while simplifying the construction of a temperature meauring device by arranging a radiometer outside a furnace so as to receive radiation energy or the like from a black body provided outside the furnace facing the opening of a cooled shielding plate mounted on the furnace wall. CONSTITUTION:A cooled shielding plate as a water-cooled plate is provided on the wall 10 of a furnace on which a strip or the like is running while a black body furnace 14 is provided outside the furnace facing an opening 20 of the plate 18 by way of a seal device 22. A radiation energy from a cold black body furnace formed by the plate 18, the hot black body furnace 14 and a moderate temperature black body furnace formed by the wall 10 near the plate 18 is detected with a radiometer 16 provided outside an opening of the furnace wall 10 facing it via a strip 12 and the temperature of the surface of a strip 12 can be measured accurately by averaging a number of measurements regardless of oscillation of the surface thereof. As the black body furnaces and the radiometer are all set up outside the furnace and only one set of the black body furnaces are required structurally, this can simplify the mechanism in a smaller size while facilitating the maintenance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8159880A JPS577530A (en) | 1980-06-17 | 1980-06-17 | Method of measuring surface temperature of object |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8159880A JPS577530A (en) | 1980-06-17 | 1980-06-17 | Method of measuring surface temperature of object |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS577530A true JPS577530A (en) | 1982-01-14 |
Family
ID=13750748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8159880A Pending JPS577530A (en) | 1980-06-17 | 1980-06-17 | Method of measuring surface temperature of object |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS577530A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03221821A (en) * | 1990-01-26 | 1991-09-30 | Chugai Ro Co Ltd | Method for controlling temperature of surface of object |
| WO2008102596A1 (en) * | 2007-02-20 | 2008-08-28 | National Institute Of Advanced Industrial Science And Technology | Method and apparatus for measuring temperature of semiconductor surface |
| JP2008235858A (en) * | 2007-02-20 | 2008-10-02 | National Institute Of Advanced Industrial & Technology | Method of measuring semiconductor surface temperature, and device therefor |
-
1980
- 1980-06-17 JP JP8159880A patent/JPS577530A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03221821A (en) * | 1990-01-26 | 1991-09-30 | Chugai Ro Co Ltd | Method for controlling temperature of surface of object |
| WO2008102596A1 (en) * | 2007-02-20 | 2008-08-28 | National Institute Of Advanced Industrial Science And Technology | Method and apparatus for measuring temperature of semiconductor surface |
| JP2008235858A (en) * | 2007-02-20 | 2008-10-02 | National Institute Of Advanced Industrial & Technology | Method of measuring semiconductor surface temperature, and device therefor |
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