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JPH03221821A - Method for controlling temperature of surface of object - Google Patents

Method for controlling temperature of surface of object

Info

Publication number
JPH03221821A
JPH03221821A JP1638190A JP1638190A JPH03221821A JP H03221821 A JPH03221821 A JP H03221821A JP 1638190 A JP1638190 A JP 1638190A JP 1638190 A JP1638190 A JP 1638190A JP H03221821 A JPH03221821 A JP H03221821A
Authority
JP
JAPAN
Prior art keywords
temperature
thin film
object
heating
radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1638190A
Other versions
JPH0675009B2 (en
Inventor
Kazuya Higeta
Original Assignee
Chugai Ro Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chugai Ro Co Ltd filed Critical Chugai Ro Co Ltd
Priority to JP2016381A priority Critical patent/JPH0675009B2/en
Publication of JPH03221821A publication Critical patent/JPH03221821A/en
Publication of JPH0675009B2 publication Critical patent/JPH0675009B2/en
Anticipated expiration legal-status Critical
Application status is Expired - Lifetime legal-status Critical

Links

Abstract

PURPOSE: To highly accurately execute temperature control by setting up the set heating temperature of a black body as the objective heating temperature of the surface of an object and controlling an object heating means so that the detecting temperature of a radiation thermometer coincides with the set heating temperature.
CONSTITUTION: A base 1 on which a thin film 2 to be an object whose temperature is to be controlled is to be formed is arranged on the upper part of a vapor deposition source 5 consisting of a crucible 3 a material for vapor deposition 4 and heated by the object heating means 6 such as an electric heater at the prescribed temperature. When the temperature T'o of the vapor deposited thin film 2 of the base 1 is less than the objective heating temperature To, radiation energy Ein made incident upon the radiation thermometer 7 is smaller than the radiation energy E(To) of the black body 8 of To, i.e. T'o<To. When the temperature T'o is higher than the temperature To, the energy Ein is larger than the energy E(To), i.e. T'o>To. Thereby, the necessity of heating of the thin film 2 can be judged by comparing both the values T'o, To and the output of the means 6 is controlled so that T'o = To, so that the temperature To of the thin film 2 can be controlled independently of a change in the radiation rate of the thin film 2.
COPYRIGHT: (C)1991,JPO&Japio
JP2016381A 1990-01-26 1990-01-26 Temperature control method of the object surface Expired - Lifetime JPH0675009B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2016381A JPH0675009B2 (en) 1990-01-26 1990-01-26 Temperature control method of the object surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016381A JPH0675009B2 (en) 1990-01-26 1990-01-26 Temperature control method of the object surface

Publications (2)

Publication Number Publication Date
JPH03221821A true JPH03221821A (en) 1991-09-30
JPH0675009B2 JPH0675009B2 (en) 1994-09-21

Family

ID=11914704

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016381A Expired - Lifetime JPH0675009B2 (en) 1990-01-26 1990-01-26 Temperature control method of the object surface

Country Status (1)

Country Link
JP (1) JPH0675009B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8005351B2 (en) 2007-05-01 2011-08-23 Mattson Technology Canada, Inc. Irradiance pulse heat-treating methods and apparatus
JP2014532164A (en) * 2011-09-15 2014-12-04 エリコン・トレーディング・アクチェンゲゼルシャフト,トリュープバッハOerlikon Trading AG,Truebbach Temperature measurement method of the substrate in the vacuum chamber
US9279727B2 (en) 2010-10-15 2016-03-08 Mattson Technology, Inc. Methods, apparatus and media for determining a shape of an irradiance pulse to which a workpiece is to be exposed
US9482468B2 (en) 2005-09-14 2016-11-01 Mattson Technology, Inc. Repeatable heat-treating methods and apparatus

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4733722U (en) * 1971-05-08 1972-12-15
JPS577530A (en) * 1980-06-17 1982-01-14 Nippon Steel Corp Method of measuring surface temperature of object
JPH0367137A (en) * 1989-08-04 1991-03-22 Chino Corp Surface temperatude controller

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4733722U (en) * 1971-05-08 1972-12-15
JPS577530A (en) * 1980-06-17 1982-01-14 Nippon Steel Corp Method of measuring surface temperature of object
JPH0367137A (en) * 1989-08-04 1991-03-22 Chino Corp Surface temperatude controller

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9482468B2 (en) 2005-09-14 2016-11-01 Mattson Technology, Inc. Repeatable heat-treating methods and apparatus
US8005351B2 (en) 2007-05-01 2011-08-23 Mattson Technology Canada, Inc. Irradiance pulse heat-treating methods and apparatus
US8693857B2 (en) 2007-05-01 2014-04-08 Mattson Technology, Inc. Irradiance pulse heat-treating methods and apparatus
US9279727B2 (en) 2010-10-15 2016-03-08 Mattson Technology, Inc. Methods, apparatus and media for determining a shape of an irradiance pulse to which a workpiece is to be exposed
JP2014532164A (en) * 2011-09-15 2014-12-04 エリコン・トレーディング・アクチェンゲゼルシャフト,トリュープバッハOerlikon Trading AG,Truebbach Temperature measurement method of the substrate in the vacuum chamber

Also Published As

Publication number Publication date
JPH0675009B2 (en) 1994-09-21

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