JPS5773966A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5773966A
JPS5773966A JP56137035A JP13703581A JPS5773966A JP S5773966 A JPS5773966 A JP S5773966A JP 56137035 A JP56137035 A JP 56137035A JP 13703581 A JP13703581 A JP 13703581A JP S5773966 A JPS5773966 A JP S5773966A
Authority
JP
Japan
Prior art keywords
film
substrate
channel type
type
diffusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56137035A
Other languages
English (en)
Inventor
Shozo Hosoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56137035A priority Critical patent/JPS5773966A/ja
Publication of JPS5773966A publication Critical patent/JPS5773966A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8232—Field-effect technology
    • H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
    • H01L21/8238—Complementary field-effect transistors, e.g. CMOS

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP56137035A 1981-09-02 1981-09-02 Manufacture of semiconductor device Pending JPS5773966A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56137035A JPS5773966A (en) 1981-09-02 1981-09-02 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56137035A JPS5773966A (en) 1981-09-02 1981-09-02 Manufacture of semiconductor device

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP10208174A Division JPS5129089A (en) 1974-09-06 1974-09-06 Cvd honyorusankamakukeiseihoho

Publications (1)

Publication Number Publication Date
JPS5773966A true JPS5773966A (en) 1982-05-08

Family

ID=15189320

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56137035A Pending JPS5773966A (en) 1981-09-02 1981-09-02 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5773966A (ja)

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