JPS5773924A - Preparation of magnetic bubble memory - Google Patents
Preparation of magnetic bubble memoryInfo
- Publication number
- JPS5773924A JPS5773924A JP15008880A JP15008880A JPS5773924A JP S5773924 A JPS5773924 A JP S5773924A JP 15008880 A JP15008880 A JP 15008880A JP 15008880 A JP15008880 A JP 15008880A JP S5773924 A JPS5773924 A JP S5773924A
- Authority
- JP
- Japan
- Prior art keywords
- film
- layer
- mask
- anode oxidation
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/32—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film
- H01F41/34—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film in patterns, e.g. by lithography
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Thin Magnetic Films (AREA)
Abstract
PURPOSE:To enable lamination of the second conductor pattern through the intermediary of a sufficiently-thin insulator layer, by applying anode oxidation with a mask of a thin insulator layer provided on the first conductor layer and by forming thereby the first conductor pattern having a flat surface. CONSTITUTION:An Al-Cu film 2 is evaporated on a magnetic film 1 formed by the liquid-phase epitaxial method and a CVD SiO2 film 5 is laminated in prescribed thickness thereon. An opening is made in the film 5 with a resist mask 6 applied, the Al-Cu layer 2 is subjected to anode oxidation, and thereby porous Al2O3 7 serving as a magnetic-bubble transmitting channel is prepared. The Al2O3 7 increases up to the position of an interface between the mask 6 and the film 5. The anode oxidation is conducted by using a solution of 1% of oxalic acid. Subsequently, the anode oxidation is made in the solution of ammonium borate in ethylene glycol, whereby the surface of the layer 7 is made into a composite Al2O3 layer 8. The mask 6 being removed, sufficiently thin CVD SiO2 9 can be formed afresh on a flat surface, and the element is completed by providing the second conductor pattern 4, an insulator layer 10, a magnetic-bubble detecting film 11 and a protection film 12.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15008880A JPS5773924A (en) | 1980-10-28 | 1980-10-28 | Preparation of magnetic bubble memory |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15008880A JPS5773924A (en) | 1980-10-28 | 1980-10-28 | Preparation of magnetic bubble memory |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5773924A true JPS5773924A (en) | 1982-05-08 |
Family
ID=15489245
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15008880A Pending JPS5773924A (en) | 1980-10-28 | 1980-10-28 | Preparation of magnetic bubble memory |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5773924A (en) |
-
1980
- 1980-10-28 JP JP15008880A patent/JPS5773924A/en active Pending
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