JPS577168A - Manufacture of mis photoelectric converter - Google Patents

Manufacture of mis photoelectric converter

Info

Publication number
JPS577168A
JPS577168A JP8069880A JP8069880A JPS577168A JP S577168 A JPS577168 A JP S577168A JP 8069880 A JP8069880 A JP 8069880A JP 8069880 A JP8069880 A JP 8069880A JP S577168 A JPS577168 A JP S577168A
Authority
JP
Japan
Prior art keywords
electrode
grooves
sio2
substrate
rear side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8069880A
Other languages
Japanese (ja)
Inventor
Shunpei Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP8069880A priority Critical patent/JPS577168A/en
Publication of JPS577168A publication Critical patent/JPS577168A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/70—Surface textures, e.g. pyramid structures
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Transforming Light Signals Into Electric Signals (AREA)
  • Photovoltaic Devices (AREA)

Abstract

PURPOSE:To contrive the improvement of the yield of an MIS element having uneveness on the surface by providing an ohmic electrode on the rear of an Si substrate wherein an Si3N4 film having the thickness permitting conduction is formed on the surface and ohmic contact to the electrode at the rear side is also finished and a counter electrode is provided on the Si3N4. CONSTITUTION:SiO2 masks 8, 11, 12 are applied on the (100) surface of a P type Si substrate 1 for anisotropic etching and grooves 9 having V grooves and pedestal convex parts are formed by adjusting etching time. Grooves 10 where the cracks on a scribed groove 5 are removed are simultaneously formed. Next, the removal of etching is applied to the SiO2 and an ohmic contact Al electrode 2 is evaporated on the rear side and an Si3N4 film 3 is formed on the surface by reacting plasmatic nitride gas and the Si substrate at 200-600 deg.C and sintering for ohmic contact is applied to the rear side and Al2 as well. Next, an Al and Ni multiple electrode 4, a pad electrode 11 and a lead 22 are selectively formed on the flat surface only to cover the electrodes 4, 11 with an SiO2 reflection-proof film 21. In this composition, a device having little leakage and high photoelectric conversion efficienty can be obtained.
JP8069880A 1980-06-14 1980-06-14 Manufacture of mis photoelectric converter Pending JPS577168A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8069880A JPS577168A (en) 1980-06-14 1980-06-14 Manufacture of mis photoelectric converter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8069880A JPS577168A (en) 1980-06-14 1980-06-14 Manufacture of mis photoelectric converter

Publications (1)

Publication Number Publication Date
JPS577168A true JPS577168A (en) 1982-01-14

Family

ID=13725541

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8069880A Pending JPS577168A (en) 1980-06-14 1980-06-14 Manufacture of mis photoelectric converter

Country Status (1)

Country Link
JP (1) JPS577168A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6453468A (en) * 1987-04-13 1989-03-01 Nukem Gmbh Solar battery

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6453468A (en) * 1987-04-13 1989-03-01 Nukem Gmbh Solar battery

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