JPS5767927A - X-ray exposure device - Google Patents
X-ray exposure deviceInfo
- Publication number
- JPS5767927A JPS5767927A JP55143824A JP14382480A JPS5767927A JP S5767927 A JPS5767927 A JP S5767927A JP 55143824 A JP55143824 A JP 55143824A JP 14382480 A JP14382480 A JP 14382480A JP S5767927 A JPS5767927 A JP S5767927A
- Authority
- JP
- Japan
- Prior art keywords
- exposure
- alignment
- region
- alignment mark
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radiography Using Non-Light Waves (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE:To realize a multiplex alignment with high accuracy, by carrying out the alignment by means of an alignment mark provided slightly outside the exposure region of a mask. CONSTITUTION:An electron beam 22 is irradiated to a rotary target 21 to excite the soft X-rays 23. For instance, the ray 23 excited at the lower part is extracted to an exposure chamber 25 through an X-ray window 24. The chamber 25 is filled with He supplied through an He flow-in port 26. An exposure is carried out to a limited region 28 of a water 27 instead of a collective exposure to be given onto the entire surface of the water 27. This exposure of a minor region is repeated by shifting the wafer 27 in the plane direction. The alignment is carried out by means of an alignment mark 30 provided slightly outside the exposure region on the mask 29 and through an alignment mark detecting part 31. In such a way, a multiplex alignment is made possible under exposure.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55143824A JPS5767927A (en) | 1980-10-15 | 1980-10-15 | X-ray exposure device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55143824A JPS5767927A (en) | 1980-10-15 | 1980-10-15 | X-ray exposure device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5767927A true JPS5767927A (en) | 1982-04-24 |
Family
ID=15347801
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55143824A Pending JPS5767927A (en) | 1980-10-15 | 1980-10-15 | X-ray exposure device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5767927A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0253283A2 (en) * | 1986-07-15 | 1988-01-20 | Siemens Aktiengesellschaft | Semiconductor wafer exposure device with synchrotron radiation in a lithography apparatus |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5057778A (en) * | 1973-09-17 | 1975-05-20 | ||
JPS5494882A (en) * | 1978-01-12 | 1979-07-26 | Oki Electric Ind Co Ltd | X-ray exposure apparatus |
JPS5583232A (en) * | 1978-12-20 | 1980-06-23 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Method and apparatus for x ray exposure |
-
1980
- 1980-10-15 JP JP55143824A patent/JPS5767927A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5057778A (en) * | 1973-09-17 | 1975-05-20 | ||
JPS5494882A (en) * | 1978-01-12 | 1979-07-26 | Oki Electric Ind Co Ltd | X-ray exposure apparatus |
JPS5583232A (en) * | 1978-12-20 | 1980-06-23 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Method and apparatus for x ray exposure |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0253283A2 (en) * | 1986-07-15 | 1988-01-20 | Siemens Aktiengesellschaft | Semiconductor wafer exposure device with synchrotron radiation in a lithography apparatus |
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