JPS5583232A - Method and apparatus for x ray exposure - Google Patents

Method and apparatus for x ray exposure

Info

Publication number
JPS5583232A
JPS5583232A JP15891278A JP15891278A JPS5583232A JP S5583232 A JPS5583232 A JP S5583232A JP 15891278 A JP15891278 A JP 15891278A JP 15891278 A JP15891278 A JP 15891278A JP S5583232 A JPS5583232 A JP S5583232A
Authority
JP
Japan
Prior art keywords
opening
outside
ray
container
shutter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15891278A
Other languages
Japanese (ja)
Inventor
Teruo Shirai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI, CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP15891278A priority Critical patent/JPS5583232A/en
Publication of JPS5583232A publication Critical patent/JPS5583232A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: To operate X ray exposure in a simple manner while preventing it from leaking outside by a method wherein X ray exposure mask is made in contact with object being exposed and both are used to close the opening of an X ray exposure atmosphere container.
CONSTITUTION: Blind plate is mounted on the outer wall of the exposure atmosphere container 21 to close the opening 21a from the outside. X ray shutter 23, holes 21b, 21c are manipulated to fill the container with He gas about +0.05atm., shutter 23 and hole 21c are closed, and the blind plate is removed to complete preparation. Parts member 24 which includes mask is clamped on the wall of the container 21 so that the member 24 covers the opening 21a. On the outside of the member 24, object being exposed 25 is attached. After the shutter 23 has been operated to perform X ray radiation, the member 24 and the object 25 are removed. The opening 21a is always closed either from the outside or inside, so exposure operation can be repeated thereafter. To prevent air from coming in, a small amount of He gas is perpetually sent through the hole 21c to the external area.
COPYRIGHT: (C)1980,JPO&Japio
JP15891278A 1978-12-20 1978-12-20 Method and apparatus for x ray exposure Pending JPS5583232A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15891278A JPS5583232A (en) 1978-12-20 1978-12-20 Method and apparatus for x ray exposure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15891278A JPS5583232A (en) 1978-12-20 1978-12-20 Method and apparatus for x ray exposure

Publications (1)

Publication Number Publication Date
JPS5583232A true JPS5583232A (en) 1980-06-23

Family

ID=15682054

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15891278A Pending JPS5583232A (en) 1978-12-20 1978-12-20 Method and apparatus for x ray exposure

Country Status (1)

Country Link
JP (1) JPS5583232A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5767927A (en) * 1980-10-15 1982-04-24 Nec Corp X-ray exposure device
JPS60154527A (en) * 1984-01-24 1985-08-14 Canon Inc Exposing device
JPS61161718A (en) * 1985-01-11 1986-07-22 Canon Inc Exposure apparatus
JPS61161719A (en) * 1985-01-11 1986-07-22 Canon Inc Exposure apparatus
JPS62237727A (en) * 1986-04-09 1987-10-17 Hitachi Ltd Mask for x-ray exposure

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5767927A (en) * 1980-10-15 1982-04-24 Nec Corp X-ray exposure device
JPS60154527A (en) * 1984-01-24 1985-08-14 Canon Inc Exposing device
JPH0542806B2 (en) * 1984-01-24 1993-06-29 Canon Kk
JPS61161718A (en) * 1985-01-11 1986-07-22 Canon Inc Exposure apparatus
JPS61161719A (en) * 1985-01-11 1986-07-22 Canon Inc Exposure apparatus
JPH0543170B2 (en) * 1985-01-11 1993-06-30 Canon Kk
JPS62237727A (en) * 1986-04-09 1987-10-17 Hitachi Ltd Mask for x-ray exposure
JPH0588534B2 (en) * 1986-04-09 1993-12-22 Hitachi Ltd

Similar Documents

Publication Publication Date Title
JPS52119178A (en) Electron beam exposure device
DE2860937D1 (en) Method and device for corpuscular ray shadow projection exposure
JPS5583232A (en) Method and apparatus for x ray exposure
JPS55139737A (en) Formation of fluorescent screen for color picture tube
EP0058137A3 (en) Apparatus for providing x-rays
JPS57174826A (en) Phosphor face forming method of color picture tube
JPS53118697A (en) Main steam water seal plug
IL80907A0 (en) Exposure arrangement for the production of masks
JPS549584A (en) X-ray exposure device
JPS5769739A (en) Exposing method and device for x-ray
JPS542723A (en) Dry diazo developing device
JPS53149767A (en) X-ray exposing device
JPS5463667A (en) Formation and its unit for fluorescent screen of color braun tube
JPS5340195A (en) Irradiating method of radioactive ray
JPS5510733A (en) Preparation of color picture tube and its device
JPS5357973A (en) Preparation of photo mask
JPS53115169A (en) Shadow mask mounting device for color picture tube
FR2382762A1 (en) CRT interior coating system - operates using automatic masking of selected zones of tube inside surface
JPS5452976A (en) Fluorescent screen exposure method for color braun tube
JPS54114177A (en) Manufacture of semiconductor device
JPS51131320A (en) Electronic shutter control device
DE3175329D1 (en) Aperture mask for a color television tube, color television tube comprising such a mask and method for obtaining the mask
JPS5355806A (en) Method and apparatus for preventing water from leaking into automotive gear mechanism
JPS5358775A (en) Production of diaphragm for electron beam exposure apparatus
JPS5365055A (en) Dummy panel