JPS5769739A - Exposing method and device for x-ray - Google Patents

Exposing method and device for x-ray

Info

Publication number
JPS5769739A
JPS5769739A JP55145463A JP14546380A JPS5769739A JP S5769739 A JPS5769739 A JP S5769739A JP 55145463 A JP55145463 A JP 55145463A JP 14546380 A JP14546380 A JP 14546380A JP S5769739 A JPS5769739 A JP S5769739A
Authority
JP
Japan
Prior art keywords
ray
specimen
exposing
exposure
exposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55145463A
Other languages
Japanese (ja)
Other versions
JPH02848B2 (en
Inventor
Koichi Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP55145463A priority Critical patent/JPS5769739A/en
Publication of JPS5769739A publication Critical patent/JPS5769739A/en
Publication of JPH02848B2 publication Critical patent/JPH02848B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2037—Exposure with X-ray radiation or corpuscular radiation, through a mask with a pattern opaque to that radiation
    • G03F7/2039—X-ray radiation

Landscapes

  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE:To obtain a uniform remaining film rate over the entire surface of a specimen by connecting a container filling gas containing no oxygen to an X-ray exposure chamber, moving the specimen to the container without exposing with the atmosperic air after exposing with the X-ray and storing it therein for a predetermined period of time. CONSTITUTION:The X-ray generated from an X-ray generation source 2 is emitted through a Be window 3 to a specimen 5 in an exposure chamber 1 filled with gas, e.g., N2 containing no O2 or in vacuum. The specimen exposed with step and repeat system is connected to an exposure chamberI, is then transferred to a treatment chamber III, is allowed to stand in gas containing no O2 for 1hr, and is then posttreated. In this manner, the remaining film rate of A and B exposed at the initial and at the last of the negative X-ray resist can become A' and B' to be uniform.
JP55145463A 1980-10-17 1980-10-17 Exposing method and device for x-ray Granted JPS5769739A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55145463A JPS5769739A (en) 1980-10-17 1980-10-17 Exposing method and device for x-ray

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55145463A JPS5769739A (en) 1980-10-17 1980-10-17 Exposing method and device for x-ray

Publications (2)

Publication Number Publication Date
JPS5769739A true JPS5769739A (en) 1982-04-28
JPH02848B2 JPH02848B2 (en) 1990-01-09

Family

ID=15385813

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55145463A Granted JPS5769739A (en) 1980-10-17 1980-10-17 Exposing method and device for x-ray

Country Status (1)

Country Link
JP (1) JPS5769739A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04136901U (en) * 1991-06-13 1992-12-21 関東自動車工業株式会社 Caster with automatic brake
JPH0620927A (en) * 1984-02-24 1994-01-28 Canon Inc X-ray transfer apparatus and method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0620927A (en) * 1984-02-24 1994-01-28 Canon Inc X-ray transfer apparatus and method
JPH04136901U (en) * 1991-06-13 1992-12-21 関東自動車工業株式会社 Caster with automatic brake

Also Published As

Publication number Publication date
JPH02848B2 (en) 1990-01-09

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