JPS5760240A - Semiconductor pressure transducer - Google Patents

Semiconductor pressure transducer

Info

Publication number
JPS5760240A
JPS5760240A JP13513480A JP13513480A JPS5760240A JP S5760240 A JPS5760240 A JP S5760240A JP 13513480 A JP13513480 A JP 13513480A JP 13513480 A JP13513480 A JP 13513480A JP S5760240 A JPS5760240 A JP S5760240A
Authority
JP
Japan
Prior art keywords
pressure
glass
pedestal
center
pressure introduction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13513480A
Other languages
Japanese (ja)
Other versions
JPS6345051B2 (en
Inventor
Shunji Shiromizu
Susumu Kimijima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP13513480A priority Critical patent/JPS5760240A/en
Publication of JPS5760240A publication Critical patent/JPS5760240A/en
Publication of JPS6345051B2 publication Critical patent/JPS6345051B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means

Abstract

PURPOSE:To obtain a small product with a better characteristic by bonding a pressure sensitive silicon diaphragm on a pedestal having a pressure introduction path at the center thereof and a base glass having a pressure introduction path beneath thereof with a low melting point. CONSTITUTION:A pressure-sensitive silicon diaphragm 2 is bonded on a silicon pedestal 3 having a pressure introduction path at the center thereof with a solder glass 1 having a working temperature of 530 deg.C, for example, beforehand. A base glass 1 made of a copal glass is embedded into the center of a metal package leaving a pressure introduction on path. The base glass 11 and the pedestal 3 are soldered together with a solder glass having a working temperature of 460 deg.C, for example. The metal package 5 is of a disc made of a copal metal having a pressure introducing pipe 8 soldered on the bottom thereof. The output of the diaphragm 2 is drawn from lead wires 13 and 15 through a hermetic seal terminal 4. Thus, a small sized transducer can be manufactured with a better creep characteristic.
JP13513480A 1980-09-30 1980-09-30 Semiconductor pressure transducer Granted JPS5760240A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13513480A JPS5760240A (en) 1980-09-30 1980-09-30 Semiconductor pressure transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13513480A JPS5760240A (en) 1980-09-30 1980-09-30 Semiconductor pressure transducer

Publications (2)

Publication Number Publication Date
JPS5760240A true JPS5760240A (en) 1982-04-12
JPS6345051B2 JPS6345051B2 (en) 1988-09-07

Family

ID=15144594

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13513480A Granted JPS5760240A (en) 1980-09-30 1980-09-30 Semiconductor pressure transducer

Country Status (1)

Country Link
JP (1) JPS5760240A (en)

Also Published As

Publication number Publication date
JPS6345051B2 (en) 1988-09-07

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