JPS5745246A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5745246A
JPS5745246A JP55120070A JP12007080A JPS5745246A JP S5745246 A JPS5745246 A JP S5745246A JP 55120070 A JP55120070 A JP 55120070A JP 12007080 A JP12007080 A JP 12007080A JP S5745246 A JPS5745246 A JP S5745246A
Authority
JP
Japan
Prior art keywords
substrate
annealed
annealing
substance
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55120070A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6333292B2 (OSRAM
Inventor
Nobuo Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP55120070A priority Critical patent/JPS5745246A/ja
Publication of JPS5745246A publication Critical patent/JPS5745246A/ja
Publication of JPS6333292B2 publication Critical patent/JPS6333292B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P34/42—

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Recrystallisation Techniques (AREA)
JP55120070A 1980-08-30 1980-08-30 Manufacture of semiconductor device Granted JPS5745246A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55120070A JPS5745246A (en) 1980-08-30 1980-08-30 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55120070A JPS5745246A (en) 1980-08-30 1980-08-30 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5745246A true JPS5745246A (en) 1982-03-15
JPS6333292B2 JPS6333292B2 (OSRAM) 1988-07-05

Family

ID=14777142

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55120070A Granted JPS5745246A (en) 1980-08-30 1980-08-30 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5745246A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS595624A (ja) * 1982-07-01 1984-01-12 Fujitsu Ltd 半導体装置の製造方法
JP2006032426A (ja) * 2004-07-12 2006-02-02 Sony Corp 半導体装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS595624A (ja) * 1982-07-01 1984-01-12 Fujitsu Ltd 半導体装置の製造方法
JP2006032426A (ja) * 2004-07-12 2006-02-02 Sony Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS6333292B2 (OSRAM) 1988-07-05

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