JPS5745225A - Semiamorphous semiconductor - Google Patents

Semiamorphous semiconductor

Info

Publication number
JPS5745225A
JPS5745225A JP12032280A JP12032280A JPS5745225A JP S5745225 A JPS5745225 A JP S5745225A JP 12032280 A JP12032280 A JP 12032280A JP 12032280 A JP12032280 A JP 12032280A JP S5745225 A JPS5745225 A JP S5745225A
Authority
JP
Japan
Prior art keywords
condition
film
high effective
free energy
semiamorphous semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12032280A
Other languages
English (en)
Inventor
Shunpei Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HANDOUTAI ENERUGII KENKYUSHO KK
Semiconductor Energy Laboratory Co Ltd
Original Assignee
HANDOUTAI ENERUGII KENKYUSHO KK
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HANDOUTAI ENERUGII KENKYUSHO KK, Semiconductor Energy Laboratory Co Ltd filed Critical HANDOUTAI ENERUGII KENKYUSHO KK
Priority to JP12032280A priority Critical patent/JPS5745225A/ja
Publication of JPS5745225A publication Critical patent/JPS5745225A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/24—Deposition of silicon only

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Photovoltaic Devices (AREA)
JP12032280A 1980-08-30 1980-08-30 Semiamorphous semiconductor Pending JPS5745225A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12032280A JPS5745225A (en) 1980-08-30 1980-08-30 Semiamorphous semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12032280A JPS5745225A (en) 1980-08-30 1980-08-30 Semiamorphous semiconductor

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP15982481A Division JPS57147431A (en) 1981-10-06 1981-10-06 Plasma gas phase method

Publications (1)

Publication Number Publication Date
JPS5745225A true JPS5745225A (en) 1982-03-15

Family

ID=14783377

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12032280A Pending JPS5745225A (en) 1980-08-30 1980-08-30 Semiamorphous semiconductor

Country Status (1)

Country Link
JP (1) JPS5745225A (ja)

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
APPL.PHYS.LETT.=1980 *
J.NON-CRYST.SOLIDS=1979 *
JAPAN.J.APPL.PHYS=1980 *

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