JPS5742829A - Pressure transducer - Google Patents
Pressure transducerInfo
- Publication number
- JPS5742829A JPS5742829A JP11909980A JP11909980A JPS5742829A JP S5742829 A JPS5742829 A JP S5742829A JP 11909980 A JP11909980 A JP 11909980A JP 11909980 A JP11909980 A JP 11909980A JP S5742829 A JPS5742829 A JP S5742829A
- Authority
- JP
- Japan
- Prior art keywords
- fixed
- capacitor plate
- moving
- electrode
- cantilever
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
Abstract
PURPOSE:To obtain a pressure transducer which is hardly applied with thermal strain and mechanical strain at a pressure receiving diaphragm and detects input pressure with high precision, by supporting a moving electrode and a fixed electrode each at one end by a single-container type pressure detection part. CONSTITUTION:A cantilever 12 consists of a fixed capacitor plate 12a which is never displaced by a supplied input and a moving capacitor plate 12c which is displaced according to the input while connected to the fixed capacitor plate 12a through a flexure 12b. The 2nd fixed electrode 13 of cantilever structure, on the other hand, faces to only the part of the fixed capacitor plate 12a to constitute a fixed capacity part C1 and the 3rd fixed electrode 14 of the cantilever structure opposes to both the parts of the fixed capacitor part 12a and moving capacitor plate 12c of the cantilever beam 12 to constitute a variable capacity part C2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11909980A JPS5742829A (en) | 1980-08-28 | 1980-08-28 | Pressure transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11909980A JPS5742829A (en) | 1980-08-28 | 1980-08-28 | Pressure transducer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5742829A true JPS5742829A (en) | 1982-03-10 |
Family
ID=14752875
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11909980A Pending JPS5742829A (en) | 1980-08-28 | 1980-08-28 | Pressure transducer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5742829A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000028293A1 (en) * | 1998-11-06 | 2000-05-18 | Siemens Aktiengesellschaft | Capacitive measuring sensor and method for operating same |
| WO2002079740A1 (en) * | 2001-03-30 | 2002-10-10 | Siemens Aktiengesellschaft | Capacitive microsystem for recording mechanical deformations, use and operating method |
-
1980
- 1980-08-28 JP JP11909980A patent/JPS5742829A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000028293A1 (en) * | 1998-11-06 | 2000-05-18 | Siemens Aktiengesellschaft | Capacitive measuring sensor and method for operating same |
| US6633172B1 (en) | 1998-11-06 | 2003-10-14 | Siemens Aktiengesellschaft | Capacitive measuring sensor and method for operating same |
| WO2002079740A1 (en) * | 2001-03-30 | 2002-10-10 | Siemens Aktiengesellschaft | Capacitive microsystem for recording mechanical deformations, use and operating method |
| US6865960B2 (en) | 2001-03-30 | 2005-03-15 | Siemens Aktiengesellschaft | Capacitive microsystem for recording mechanical deformations, use and operating method |
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