JPS5742129A - Detector for position of mark in electron ray exposure - Google Patents
Detector for position of mark in electron ray exposureInfo
- Publication number
- JPS5742129A JPS5742129A JP11821180A JP11821180A JPS5742129A JP S5742129 A JPS5742129 A JP S5742129A JP 11821180 A JP11821180 A JP 11821180A JP 11821180 A JP11821180 A JP 11821180A JP S5742129 A JPS5742129 A JP S5742129A
- Authority
- JP
- Japan
- Prior art keywords
- signal
- output
- mark
- detector
- computer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
- H01J37/3045—Object or beam position registration
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
- Control Of Position Or Direction (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Measurement Of Radiation (AREA)
Abstract
PURPOSE:To obtain the central positions of the marks by selecting the output of circuits each processing a signal approximating to the mark that the unevenness of a surface to be exposed generates and a signal approximating to the mark generated at a boundary with the quality of material different from the circumference by the output of an electronic detector. CONSTITUTION:A sample is extracted 23 through an HPF 9a by an output signal of the detector 7a, the extracted signal is A/D-converted 24, a waveform is analyzed by means of a computer 2, and the signal is selected 22. When a supply signal to the computer has positive and negative peaks, the difference of the absolute values is smaller than a fixed value and there is a value close to zero in the vicinity of the middle point of the signal, the output of a substracter 10 is passed. When the supply signal has only the positive peak, the difference of the absolute values of the positive and negative peaks is larger than the fixed value and there is no value close to zero in the vicinity of the middle point of the signal, output 18 which adds 19, clips 20 and differentiates 21 the output of HPFs 9a, 9b is passed, the waveform is converted 14, pulse output is given to the computer 2 and the central position of the marks can be computed without errors.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11821180A JPS5742129A (en) | 1980-08-27 | 1980-08-27 | Detector for position of mark in electron ray exposure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11821180A JPS5742129A (en) | 1980-08-27 | 1980-08-27 | Detector for position of mark in electron ray exposure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5742129A true JPS5742129A (en) | 1982-03-09 |
Family
ID=14730952
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11821180A Pending JPS5742129A (en) | 1980-08-27 | 1980-08-27 | Detector for position of mark in electron ray exposure |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5742129A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60249008A (en) * | 1984-05-25 | 1985-12-09 | Hitachi Ltd | Charged particle microprobe instrument |
| JPS62109446U (en) * | 1985-12-27 | 1987-07-13 | ||
| US5243941A (en) * | 1991-07-29 | 1993-09-14 | Asmo Co., Ltd. | Actuator for engine idling control mechanism |
| JP2008268132A (en) * | 2007-04-24 | 2008-11-06 | Seiko Precision Inc | Reference scale, manufacturing method thereof, and machining device |
-
1980
- 1980-08-27 JP JP11821180A patent/JPS5742129A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60249008A (en) * | 1984-05-25 | 1985-12-09 | Hitachi Ltd | Charged particle microprobe instrument |
| JPS62109446U (en) * | 1985-12-27 | 1987-07-13 | ||
| US5243941A (en) * | 1991-07-29 | 1993-09-14 | Asmo Co., Ltd. | Actuator for engine idling control mechanism |
| JP2008268132A (en) * | 2007-04-24 | 2008-11-06 | Seiko Precision Inc | Reference scale, manufacturing method thereof, and machining device |
| JP4671988B2 (en) * | 2007-04-24 | 2011-04-20 | セイコープレシジョン株式会社 | Reference scale, manufacturing method thereof, and processing apparatus |
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