JPS5741375A - Ion treating device - Google Patents
Ion treating deviceInfo
- Publication number
- JPS5741375A JPS5741375A JP11644880A JP11644880A JPS5741375A JP S5741375 A JPS5741375 A JP S5741375A JP 11644880 A JP11644880 A JP 11644880A JP 11644880 A JP11644880 A JP 11644880A JP S5741375 A JPS5741375 A JP S5741375A
- Authority
- JP
- Japan
- Prior art keywords
- ion
- substrate
- cups
- electrodes
- showers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11644880A JPS5943992B2 (ja) | 1980-08-26 | 1980-08-26 | イオン処理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11644880A JPS5943992B2 (ja) | 1980-08-26 | 1980-08-26 | イオン処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5741375A true JPS5741375A (en) | 1982-03-08 |
JPS5943992B2 JPS5943992B2 (ja) | 1984-10-25 |
Family
ID=14687359
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11644880A Expired JPS5943992B2 (ja) | 1980-08-26 | 1980-08-26 | イオン処理装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5943992B2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62185324A (ja) * | 1986-02-12 | 1987-08-13 | Hitachi Ltd | プラズマ処理装置 |
JPS6376873A (ja) * | 1986-09-18 | 1988-04-07 | Daido Gakuen | 基材に対して薄膜を付着する方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0425723Y2 (ja) * | 1986-09-22 | 1992-06-19 |
-
1980
- 1980-08-26 JP JP11644880A patent/JPS5943992B2/ja not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62185324A (ja) * | 1986-02-12 | 1987-08-13 | Hitachi Ltd | プラズマ処理装置 |
JPS6376873A (ja) * | 1986-09-18 | 1988-04-07 | Daido Gakuen | 基材に対して薄膜を付着する方法 |
JPH062940B2 (ja) * | 1986-09-18 | 1994-01-12 | 学校法人大同学園 | 基材に対して薄膜を付着する方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS5943992B2 (ja) | 1984-10-25 |
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