JPS5739167A - Glow discharge heat treatment apparatus - Google Patents

Glow discharge heat treatment apparatus

Info

Publication number
JPS5739167A
JPS5739167A JP11285780A JP11285780A JPS5739167A JP S5739167 A JPS5739167 A JP S5739167A JP 11285780 A JP11285780 A JP 11285780A JP 11285780 A JP11285780 A JP 11285780A JP S5739167 A JPS5739167 A JP S5739167A
Authority
JP
Japan
Prior art keywords
treated
objects
nitriding
ion
carburizing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11285780A
Other languages
Japanese (ja)
Inventor
Tomoaki Kaneko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NDK Inc
Original Assignee
Nihon Denshi Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi Kogyo KK filed Critical Nihon Denshi Kogyo KK
Priority to JP11285780A priority Critical patent/JPS5739167A/en
Publication of JPS5739167A publication Critical patent/JPS5739167A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)

Abstract

PURPOSE:To carry out stable nitriding or carburizing treatment over a long period of time, in applying treatment such as ion nitriding, ion carburizing or the like to an object to be treated by glow discharge, by adjusting the object to be treated to earth potential and, if necessary, heating the same. CONSTITUTION:Objects 4a-4d to be treated are placed on plural steps of shelves 3a-3d provided to an electroconductive cylinder 2 in a steel vacuum container 1. An interior of the container 1 is evacuated to 0.2-20 torr by a vacuum pump 9 and a nitriding or carburizing atmospheric gas is introduced from a bomb 11. Subsequently, from a D.C. high voltage power source 7, voltage of several hundreds- several thousands volt is applied between an anode 5 and the container held at earth potential, that is, the objects 4a-4d to be treated and the atmospheric gas is ionized by glow discharge to subject said objects to be treated to ion nitriding or ion carburizing treatment. In this time, the temp. of the objects to be treated detected by a thermocouple 14 is applied to a control circuit 16 to control voltage of the power source 7 and a heater power source 13. Stable treatment can be carried out at high heat efficiency.
JP11285780A 1980-08-16 1980-08-16 Glow discharge heat treatment apparatus Pending JPS5739167A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11285780A JPS5739167A (en) 1980-08-16 1980-08-16 Glow discharge heat treatment apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11285780A JPS5739167A (en) 1980-08-16 1980-08-16 Glow discharge heat treatment apparatus

Publications (1)

Publication Number Publication Date
JPS5739167A true JPS5739167A (en) 1982-03-04

Family

ID=14597263

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11285780A Pending JPS5739167A (en) 1980-08-16 1980-08-16 Glow discharge heat treatment apparatus

Country Status (1)

Country Link
JP (1) JPS5739167A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4804523A (en) * 1987-06-17 1989-02-14 Bechtel Group, Incorporated Use of seawater in flue gas desulfurization
KR100759828B1 (en) 2006-05-11 2007-09-18 배진범 Heat treatmenting apparatus by the plasma ritriding

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4804523A (en) * 1987-06-17 1989-02-14 Bechtel Group, Incorporated Use of seawater in flue gas desulfurization
KR100759828B1 (en) 2006-05-11 2007-09-18 배진범 Heat treatmenting apparatus by the plasma ritriding

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