JPS5738540A - Field emission type ion source - Google Patents

Field emission type ion source

Info

Publication number
JPS5738540A
JPS5738540A JP11370980A JP11370980A JPS5738540A JP S5738540 A JPS5738540 A JP S5738540A JP 11370980 A JP11370980 A JP 11370980A JP 11370980 A JP11370980 A JP 11370980A JP S5738540 A JPS5738540 A JP S5738540A
Authority
JP
Japan
Prior art keywords
section
ion generation
main body
raw material
protruded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11370980A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6362860B2 (enrdf_load_stackoverflow
Inventor
Katsuhiro Kawabuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP11370980A priority Critical patent/JPS5738540A/ja
Publication of JPS5738540A publication Critical patent/JPS5738540A/ja
Publication of JPS6362860B2 publication Critical patent/JPS6362860B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
JP11370980A 1980-08-19 1980-08-19 Field emission type ion source Granted JPS5738540A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11370980A JPS5738540A (en) 1980-08-19 1980-08-19 Field emission type ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11370980A JPS5738540A (en) 1980-08-19 1980-08-19 Field emission type ion source

Publications (2)

Publication Number Publication Date
JPS5738540A true JPS5738540A (en) 1982-03-03
JPS6362860B2 JPS6362860B2 (enrdf_load_stackoverflow) 1988-12-05

Family

ID=14619167

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11370980A Granted JPS5738540A (en) 1980-08-19 1980-08-19 Field emission type ion source

Country Status (1)

Country Link
JP (1) JPS5738540A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5873947A (ja) * 1981-10-26 1983-05-04 Jeol Ltd イオン銃
JPS6241748A (ja) * 1985-08-13 1987-02-23 太平洋セメント株式会社 不燃性無機建材の製造方法
FR2662543A1 (fr) * 1990-05-22 1991-11-29 Amp Inc Assemblage pour etablir un trajet electrique separable entre une zone situee sur un substrat et une zone situee sur un autre substrat.

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5873947A (ja) * 1981-10-26 1983-05-04 Jeol Ltd イオン銃
JPS6241748A (ja) * 1985-08-13 1987-02-23 太平洋セメント株式会社 不燃性無機建材の製造方法
FR2662543A1 (fr) * 1990-05-22 1991-11-29 Amp Inc Assemblage pour etablir un trajet electrique separable entre une zone situee sur un substrat et une zone situee sur un autre substrat.

Also Published As

Publication number Publication date
JPS6362860B2 (enrdf_load_stackoverflow) 1988-12-05

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