JPS573797A - Vapor phase growing method of compound semiconductor and its vapor phase growing apparatus - Google Patents

Vapor phase growing method of compound semiconductor and its vapor phase growing apparatus

Info

Publication number
JPS573797A
JPS573797A JP7739080A JP7739080A JPS573797A JP S573797 A JPS573797 A JP S573797A JP 7739080 A JP7739080 A JP 7739080A JP 7739080 A JP7739080 A JP 7739080A JP S573797 A JPS573797 A JP S573797A
Authority
JP
Japan
Prior art keywords
gas
substrate
vapor phase
flowing
phase growing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7739080A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6353160B2 (enrdf_load_stackoverflow
Inventor
Kenya Nakai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7739080A priority Critical patent/JPS573797A/ja
Publication of JPS573797A publication Critical patent/JPS573797A/ja
Publication of JPS6353160B2 publication Critical patent/JPS6353160B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP7739080A 1980-06-09 1980-06-09 Vapor phase growing method of compound semiconductor and its vapor phase growing apparatus Granted JPS573797A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7739080A JPS573797A (en) 1980-06-09 1980-06-09 Vapor phase growing method of compound semiconductor and its vapor phase growing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7739080A JPS573797A (en) 1980-06-09 1980-06-09 Vapor phase growing method of compound semiconductor and its vapor phase growing apparatus

Publications (2)

Publication Number Publication Date
JPS573797A true JPS573797A (en) 1982-01-09
JPS6353160B2 JPS6353160B2 (enrdf_load_stackoverflow) 1988-10-21

Family

ID=13632556

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7739080A Granted JPS573797A (en) 1980-06-09 1980-06-09 Vapor phase growing method of compound semiconductor and its vapor phase growing apparatus

Country Status (1)

Country Link
JP (1) JPS573797A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002542142A (ja) * 1999-04-16 2002-12-10 シービーエル テクノロジーズ インコーポレイテッド 複合ガス導入システムおよび方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01301337A (ja) * 1988-05-31 1989-12-05 Tokyo Electric Co Ltd 秤付ラベル発行機

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55107227A (en) * 1979-02-08 1980-08-16 Mitsubishi Electric Corp Device for growing of semiconductor in vapor phase

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55107227A (en) * 1979-02-08 1980-08-16 Mitsubishi Electric Corp Device for growing of semiconductor in vapor phase

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002542142A (ja) * 1999-04-16 2002-12-10 シービーエル テクノロジーズ インコーポレイテッド 複合ガス導入システムおよび方法
JP4818515B2 (ja) * 1999-04-16 2011-11-16 シービーエル テクノロジーズ インコーポレイテッド 試薬ガスを基板に送達する方法

Also Published As

Publication number Publication date
JPS6353160B2 (enrdf_load_stackoverflow) 1988-10-21

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