JPS5586113A - Vapor phase growth process - Google Patents
Vapor phase growth processInfo
- Publication number
- JPS5586113A JPS5586113A JP16162378A JP16162378A JPS5586113A JP S5586113 A JPS5586113 A JP S5586113A JP 16162378 A JP16162378 A JP 16162378A JP 16162378 A JP16162378 A JP 16162378A JP S5586113 A JPS5586113 A JP S5586113A
- Authority
- JP
- Japan
- Prior art keywords
- container
- gas
- vapor phase
- phase growth
- sulfur
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Junction Field-Effect Transistors (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To obtain a desired impurity density distribution in a vapor phase growth layer in good reproducibility through simple operation by dropping suddenly a temperature to hold a vessel containing an impurity source to add in the vapor phase growth layer lower than a constant temperature.
CONSTITUTION: A buffer layer of high resistance is grown by feeding a carrier gas containing AsCl3 gas on Ga 3 through passing AsCl3 bulb container 4 from a gas path. Then, a path 7 is opened with the gas fed from paths 5, 8 retained as it is, a carrier gas containing sulfur-saturated gas is fed in a reaction tube 1 from a sulfur container 6 kept warm by a thermostatic oven 11 installed beforehand, and few seconds later, the container 6 is removed from the thermostatic oven 11. The container 6 is thus exposed to room atmosphere to sudden cooling, and a steam pressure of the sulfur gas from the container 6 is decreased to grow an operation layer. A desired impurity density distribution can thus be formed in the vapor phase growth layer.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16162378A JPS5586113A (en) | 1978-12-23 | 1978-12-23 | Vapor phase growth process |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16162378A JPS5586113A (en) | 1978-12-23 | 1978-12-23 | Vapor phase growth process |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5586113A true JPS5586113A (en) | 1980-06-28 |
JPS5712527B2 JPS5712527B2 (en) | 1982-03-11 |
Family
ID=15738693
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16162378A Granted JPS5586113A (en) | 1978-12-23 | 1978-12-23 | Vapor phase growth process |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5586113A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010077977A (en) * | 2008-09-23 | 2010-04-08 | Murakami Corp | Suction cup device |
CN109962164A (en) * | 2019-03-26 | 2019-07-02 | 暨南大学 | A kind of constant temperature gas treatment equipment includes solar battery of three-dimensional-two-dimentional perovskite thin film and preparation method thereof |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5248467A (en) * | 1975-10-15 | 1977-04-18 | Fujitsu Ltd | Process for production of semiconductor device |
-
1978
- 1978-12-23 JP JP16162378A patent/JPS5586113A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5248467A (en) * | 1975-10-15 | 1977-04-18 | Fujitsu Ltd | Process for production of semiconductor device |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010077977A (en) * | 2008-09-23 | 2010-04-08 | Murakami Corp | Suction cup device |
CN109962164A (en) * | 2019-03-26 | 2019-07-02 | 暨南大学 | A kind of constant temperature gas treatment equipment includes solar battery of three-dimensional-two-dimentional perovskite thin film and preparation method thereof |
Also Published As
Publication number | Publication date |
---|---|
JPS5712527B2 (en) | 1982-03-11 |
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