JPS5737838A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5737838A JPS5737838A JP11418880A JP11418880A JPS5737838A JP S5737838 A JPS5737838 A JP S5737838A JP 11418880 A JP11418880 A JP 11418880A JP 11418880 A JP11418880 A JP 11418880A JP S5737838 A JPS5737838 A JP S5737838A
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- film
- nitriding
- vapor
- active region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Element Separation (AREA)
- Formation Of Insulating Films (AREA)
- Local Oxidation Of Silicon (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11418880A JPS5737838A (en) | 1980-08-20 | 1980-08-20 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11418880A JPS5737838A (en) | 1980-08-20 | 1980-08-20 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5737838A true JPS5737838A (en) | 1982-03-02 |
Family
ID=14631395
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11418880A Pending JPS5737838A (en) | 1980-08-20 | 1980-08-20 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5737838A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63150691A (ja) * | 1986-12-15 | 1988-06-23 | 富士電機株式会社 | 原子炉のオフセツトア−ム式燃料交換機 |
US5013692A (en) * | 1988-12-08 | 1991-05-07 | Sharp Kabushiki Kaisha | Process for preparing a silicon nitride insulating film for semiconductor memory device |
-
1980
- 1980-08-20 JP JP11418880A patent/JPS5737838A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63150691A (ja) * | 1986-12-15 | 1988-06-23 | 富士電機株式会社 | 原子炉のオフセツトア−ム式燃料交換機 |
US5013692A (en) * | 1988-12-08 | 1991-05-07 | Sharp Kabushiki Kaisha | Process for preparing a silicon nitride insulating film for semiconductor memory device |
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