JPS5737327A - Directional coupler type optical modulator - Google Patents

Directional coupler type optical modulator

Info

Publication number
JPS5737327A
JPS5737327A JP11242980A JP11242980A JPS5737327A JP S5737327 A JPS5737327 A JP S5737327A JP 11242980 A JP11242980 A JP 11242980A JP 11242980 A JP11242980 A JP 11242980A JP S5737327 A JPS5737327 A JP S5737327A
Authority
JP
Japan
Prior art keywords
layer
substrate
algaas
grooves
gaas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11242980A
Other languages
Japanese (ja)
Inventor
Masahiko Fujiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP11242980A priority Critical patent/JPS5737327A/en
Publication of JPS5737327A publication Critical patent/JPS5737327A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/31Digital deflection, i.e. optical switching
    • G02F1/313Digital deflection, i.e. optical switching in an optical waveguide structure
    • G02F1/3132Digital deflection, i.e. optical switching in an optical waveguide structure of directional coupler type
    • G02F1/3133Digital deflection, i.e. optical switching in an optical waveguide structure of directional coupler type the optical waveguides being made of semiconducting materials

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

PURPOSE:To obtain an optical modulator of high modulation efficiency and low losses by providing a semiconductor substrate of relatively low electric resistivity having grooves on the surface, and the semiconductor layers, buffer layers and metallic electrodes satisfying specific relations on this substrate. CONSTITUTION:Two pieces of proximate and prallel grooves 22 are beforehand formed on an n<+>-GaAs substrate 21 by etching or the like. The 1st layer 23 of n<+>-AlGaAs is formed on the substrate 21 formed with said grooves. At this time, it is so formed that the interfaces in the upper parts of the groove parts are raised to the substrate side. A clad layer 24 of n<+>-AlGaAs having a refractive index larger than that of the 1st layer 23, a waveguide layer 25 of n<->-AlAs or n<->-GaAs having a refractive index larger than the clad layer 24, and a buffer layer 26 of n<->-GaAs or n-AlGaAs having a refractive index lower than that of the layer 25 are successively formed on the 1st layer 23, and electrodes 27 forming Schottky junctions are formed in the upper part of the groove parts of the substrate on the top surface of the buffer layer 26.
JP11242980A 1980-08-15 1980-08-15 Directional coupler type optical modulator Pending JPS5737327A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11242980A JPS5737327A (en) 1980-08-15 1980-08-15 Directional coupler type optical modulator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11242980A JPS5737327A (en) 1980-08-15 1980-08-15 Directional coupler type optical modulator

Publications (1)

Publication Number Publication Date
JPS5737327A true JPS5737327A (en) 1982-03-01

Family

ID=14586413

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11242980A Pending JPS5737327A (en) 1980-08-15 1980-08-15 Directional coupler type optical modulator

Country Status (1)

Country Link
JP (1) JPS5737327A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0121401A2 (en) * 1983-03-31 1984-10-10 Sumitomo Electric Industries Limited Light modulation device
FR2558271A1 (en) * 1983-12-02 1985-07-19 Carenco Alain Electro-optical directional coupler with double heterostructure and with strips

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5221842A (en) * 1975-08-12 1977-02-18 Nippon Telegr & Teleph Corp <Ntt> Directional light coupler

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5221842A (en) * 1975-08-12 1977-02-18 Nippon Telegr & Teleph Corp <Ntt> Directional light coupler

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0121401A2 (en) * 1983-03-31 1984-10-10 Sumitomo Electric Industries Limited Light modulation device
US4685763A (en) * 1983-03-31 1987-08-11 Sumitomo Electric Industries, Ltd. Light modulation device
FR2558271A1 (en) * 1983-12-02 1985-07-19 Carenco Alain Electro-optical directional coupler with double heterostructure and with strips

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