JPS57157586A - Semiconductor laser device - Google Patents

Semiconductor laser device

Info

Publication number
JPS57157586A
JPS57157586A JP4290781A JP4290781A JPS57157586A JP S57157586 A JPS57157586 A JP S57157586A JP 4290781 A JP4290781 A JP 4290781A JP 4290781 A JP4290781 A JP 4290781A JP S57157586 A JPS57157586 A JP S57157586A
Authority
JP
Japan
Prior art keywords
layer
layers
strips
buried
parallel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4290781A
Other languages
Japanese (ja)
Inventor
Naoto Mogi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP4290781A priority Critical patent/JPS57157586A/en
Publication of JPS57157586A publication Critical patent/JPS57157586A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/20Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/22Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
    • H01S5/227Buried mesa structure ; Striped active layer
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/40Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4025Array arrangements, e.g. constituted by discrete laser diodes or laser bar
    • H01S5/4031Edge-emitting structures
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/20Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/22Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
    • H01S5/227Buried mesa structure ; Striped active layer
    • H01S5/2275Buried mesa structure ; Striped active layer mesa created by etching

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Geometry (AREA)
  • Semiconductor Lasers (AREA)

Abstract

PURPOSE:To obtain laser light of large power from a semiconductor laser device by providing a pair of mesa strips containing active layers in parallel with each other on a semiconductor substrate and setting the equivalent refractive index of waveguides in the prescribed relationship. CONSTITUTION:A pair of mesa strips 15 formed of clad layers 12, active layers 13 and clad layers 14 are formed in parallel on a GaAs substrate 11. Waveguides of double hetero DH structure in which the layer 13 is interposed between the layers 12 and 14 are formed at the layers 15. A buried layer 19 having waveguide structure of DH structure formed of a p type later 16, an i type layer 17 and an n type layer 18 is buried in the region between the strips 15. On the other hand, a buried layer 20 formed of the layers 16-18 is buried outside the strips 15. In this structure, the equivalent refractive index of the least order mode of the waveguide is set to the relationship of n2>n1>n3, where n1 represents the strips, n2 represents the layer 19 an n3 represents the layer 20. In this manner, extremely stable lateral minimum order mode oscillation can be obtained in a direction parallel to the main surface of a crystal, and large power can be obtained.
JP4290781A 1981-03-24 1981-03-24 Semiconductor laser device Pending JPS57157586A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4290781A JPS57157586A (en) 1981-03-24 1981-03-24 Semiconductor laser device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4290781A JPS57157586A (en) 1981-03-24 1981-03-24 Semiconductor laser device

Publications (1)

Publication Number Publication Date
JPS57157586A true JPS57157586A (en) 1982-09-29

Family

ID=12649097

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4290781A Pending JPS57157586A (en) 1981-03-24 1981-03-24 Semiconductor laser device

Country Status (1)

Country Link
JP (1) JPS57157586A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6014484A (en) * 1983-07-04 1985-01-25 Matsushita Electric Ind Co Ltd Semiconductor laser device
JPS60198796A (en) * 1983-12-01 1985-10-08 テイア−ルダブリユ− インコ−ポレ−テツド Semiconductor laser having stopping layer

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
APPLIED PHYSICS LETTERS=1980 *
XEROX DISCLOSURE JOURNAL=1979 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6014484A (en) * 1983-07-04 1985-01-25 Matsushita Electric Ind Co Ltd Semiconductor laser device
JPS60198796A (en) * 1983-12-01 1985-10-08 テイア−ルダブリユ− インコ−ポレ−テツド Semiconductor laser having stopping layer

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