JPS573212A - Forming method for multilayer film for electronic circuit - Google Patents

Forming method for multilayer film for electronic circuit

Info

Publication number
JPS573212A
JPS573212A JP7563280A JP7563280A JPS573212A JP S573212 A JPS573212 A JP S573212A JP 7563280 A JP7563280 A JP 7563280A JP 7563280 A JP7563280 A JP 7563280A JP S573212 A JPS573212 A JP S573212A
Authority
JP
Japan
Prior art keywords
film
multilayered film
vapor
multilayered
electronic circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7563280A
Other languages
Japanese (ja)
Inventor
Masanobu Hanazono
Hiroshi Akiyama
Shinichi Hara
Mitsuo Sakimura
Hiroji Kawakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7563280A priority Critical patent/JPS573212A/en
Publication of JPS573212A publication Critical patent/JPS573212A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive

Landscapes

  • Magnetic Heads (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)

Abstract

PURPOSE:To obtain a high-precision multilayered film free from a shift in position by forming a mask with a smaller window than the opening of an intermediate layer on a substrate through the intermediate layer, and then by forming the multilayered film by alternating vapor deposition and ion plating. CONSTITUTION:For the formation of a multilayered film consisting of alternately stacked conductor films 13 and insulating films 14, for example, polyimide resin 11 is applied over a substrate 1 to about 5mum and after it is cured, and about 0.3mum thickness film of Mo12 is vapor-deposited. The Mo film 12 is photoetched to form an accurate pattern. In an atmosphere of O2, sputtering is carried out to cut into the resin film 11. Under high vacuum, a conductor 13 is vapor-deposited from above and on it, and insulating film 14 is stacked by ion plating. This operation is repeated to obtain a multilayered film. Thus, the high-precision multilayered film free from a shift in position is obtained.
JP7563280A 1980-06-06 1980-06-06 Forming method for multilayer film for electronic circuit Pending JPS573212A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7563280A JPS573212A (en) 1980-06-06 1980-06-06 Forming method for multilayer film for electronic circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7563280A JPS573212A (en) 1980-06-06 1980-06-06 Forming method for multilayer film for electronic circuit

Publications (1)

Publication Number Publication Date
JPS573212A true JPS573212A (en) 1982-01-08

Family

ID=13581813

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7563280A Pending JPS573212A (en) 1980-06-06 1980-06-06 Forming method for multilayer film for electronic circuit

Country Status (1)

Country Link
JP (1) JPS573212A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014044785A (en) * 2012-08-28 2014-03-13 Dainippon Printing Co Ltd Suspension substrate, suspension, suspension with head, and hard disk drive

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014044785A (en) * 2012-08-28 2014-03-13 Dainippon Printing Co Ltd Suspension substrate, suspension, suspension with head, and hard disk drive

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