SE7513853L - PROCEDURE FOR MANUFACTURE OF ELECTRICAL CONDUCTORS ON AN INSULATING SUBSTRATE - Google Patents
PROCEDURE FOR MANUFACTURE OF ELECTRICAL CONDUCTORS ON AN INSULATING SUBSTRATEInfo
- Publication number
- SE7513853L SE7513853L SE7513853A SE7513853A SE7513853L SE 7513853 L SE7513853 L SE 7513853L SE 7513853 A SE7513853 A SE 7513853A SE 7513853 A SE7513853 A SE 7513853A SE 7513853 L SE7513853 L SE 7513853L
- Authority
- SE
- Sweden
- Prior art keywords
- layer
- thick
- layers
- substrate
- insulating substrate
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
- H05K3/388—Improvement of the adhesion between the insulating substrate and the metal by the use of a metallic or inorganic thin film adhesion layer
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/10—Electroplating with more than one layer of the same or of different metals
- C25D5/12—Electroplating with more than one layer of the same or of different metals at least one layer being of nickel or chromium
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/60—Electroplating characterised by the structure or texture of the layers
- C25D5/623—Porosity of the layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/702—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof of thick-or thin-film circuits or parts thereof
- H01L21/707—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof of thick-or thin-film circuits or parts thereof of thin-film circuits or parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49866—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers characterised by the materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/01—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate comprising only passive thin-film or thick-film elements formed on a common insulating substrate
- H01L27/016—Thin-film circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/24—Reinforcing the conductive pattern
- H05K3/243—Reinforcing the conductive pattern characterised by selective plating, e.g. for finish plating of pads
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/24—Reinforcing the conductive pattern
- H05K3/244—Finish plating of conductors, especially of copper conductors, e.g. for pads or lands
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/0332—Structure of the conductor
- H05K2201/0364—Conductor shape
- H05K2201/0367—Metallic bump or raised conductor not used as solder bump
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
- H05K2203/0703—Plating
- H05K2203/0723—Electroplating, e.g. finish plating
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
- H05K3/061—Etching masks
- H05K3/062—Etching masks consisting of metals or alloys or metallic inorganic compounds
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/108—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by semi-additive methods; masks therefor
Abstract
1527108 Forming multi-layer conductors by electro-plating WESTERN ELECTRIC CO Inc 8 Dec 1975 [10 Dec 1974 12 May 1975] 50291/75 Heading C7B Electrical conductors are formed on an insulating substrate for the inter-connect pattern of an integrated circuit by forming over the substrate in turn a Ti layer e.g. 1500-3000Š thick in a desired pattern, a Pd layer e.g. 200-3000A thick, a Cu layer e.g. 3000-7000A thick, then electroplating in turn additional Cu on to a portion of the first Cu layer e.g. to a total thickness of 25000- 40000Š, a Ni layer e.g. 8000-20000Š, a Au layer e.g. 15000-25000Š on at least a portion of the Ni layer, and removing those portions of the Ti, Pd and Cu layers not covered by the electro-plated metals, e.g. by immersion in ammonium persulphate solution (for Cu) and HF solution (for Ti). The Ti, Pd and first Cu layers may be formed by electron gun evaporation or sputtering. The substrate may be alumina on which is deposited Ta or Ti nitride resistor/capacitor elements. The resulting structure may be heated at 200 to 400‹C. A photo-resist may be applied, exposed and developed after the first Cu and the Ni layers.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/531,430 US4068022A (en) | 1974-12-10 | 1974-12-10 | Methods of strengthening bonds |
US05/576,711 US4016050A (en) | 1975-05-12 | 1975-05-12 | Conduction system for thin film and hybrid integrated circuits |
Publications (2)
Publication Number | Publication Date |
---|---|
SE7513853L true SE7513853L (en) | 1976-06-11 |
SE427400B SE427400B (en) | 1983-03-28 |
Family
ID=27063541
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE7513853A SE427400B (en) | 1974-12-10 | 1975-12-09 | PROCEDURE FOR MANUFACTURING ELECTRICAL CONDUCTORS ON AN INSULATING SUBSTRATE |
Country Status (8)
Country | Link |
---|---|
JP (1) | JPS6032311B2 (en) |
DE (1) | DE2554691C2 (en) |
ES (1) | ES443346A1 (en) |
FR (1) | FR2294610A1 (en) |
GB (1) | GB1527108A (en) |
IT (1) | IT1051461B (en) |
NL (1) | NL185249C (en) |
SE (1) | SE427400B (en) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4153518A (en) * | 1977-11-18 | 1979-05-08 | Tektronix, Inc. | Method of making a metalized substrate having a thin film barrier layer |
JPS54127572A (en) * | 1978-03-28 | 1979-10-03 | Oki Electric Ind Co Ltd | Thin film circuit |
DE2833919C2 (en) * | 1978-08-02 | 1982-06-09 | Siemens AG, 1000 Berlin und 8000 München | Process for the production of electrical layer circuits on plastic foils |
JPS5559795A (en) * | 1978-10-30 | 1980-05-06 | Nippon Electric Co | Printed circuit board and method of manufacturing same |
DE2965814D1 (en) * | 1979-03-21 | 1983-08-11 | Bbc Brown Boveri & Cie | Thin film resistor having a high temperature coefficient and method of manufacturing the same |
FR2476913B1 (en) * | 1980-02-25 | 1985-09-13 | Nippon Electric Co | MULTI-LAYERED CIRCUIT FOR LARGE-SCALE INTEGRATION AND METHOD FOR MANUFACTURING THE SAME |
DE3029277C2 (en) * | 1980-08-01 | 1983-10-20 | Siemens AG, 1000 Berlin und 8000 München | Build-up of metal layers |
DE3029382A1 (en) * | 1980-08-01 | 1982-03-04 | Siemens AG, 1000 Berlin und 8000 München | Conductor pattern for semiconductor device on insulating substrate - where multilayer pattern includes palladium covered by palladium oxide and then gold |
DE3107943A1 (en) * | 1981-03-02 | 1982-09-16 | Siemens AG, 1000 Berlin und 8000 München | METHOD FOR THE PRODUCTION OF SOLDERABLE AND TEMPERATURE-ENDED METAL-FREE THICK-LAYER CONDUCTORS |
JPS57198696A (en) * | 1981-06-01 | 1982-12-06 | Shimada Rika Kogyo Kk | Method of producing thin film circuit |
DE3207659A1 (en) * | 1982-03-03 | 1983-09-15 | Siemens AG, 1000 Berlin und 8000 München | Thin-film circuits with through-contact holes |
US4463059A (en) * | 1982-06-30 | 1984-07-31 | International Business Machines Corporation | Layered metal film structures for LSI chip carriers adapted for solder bonding and wire bonding |
JPS59167096A (en) * | 1983-03-11 | 1984-09-20 | 日本電気株式会社 | Circuit board |
JPS60140897A (en) * | 1983-12-28 | 1985-07-25 | 日本電気株式会社 | Resin insulated multilayer board |
DE3433251A1 (en) * | 1984-08-16 | 1986-02-27 | Robert Bosch Gmbh, 7000 Stuttgart | METHOD FOR PRODUCING GALVANIC SOLDER LAYERS ON INORGANIC SUBSTRATES |
US4808274A (en) * | 1986-09-10 | 1989-02-28 | Engelhard Corporation | Metallized substrates and process for producing |
DE3785720T2 (en) * | 1986-09-25 | 1993-08-12 | Toshiba Kawasaki Kk | METHOD FOR PRODUCING A FILM CARRIER. |
JPH03108797A (en) * | 1989-09-22 | 1991-05-08 | Ngk Spark Plug Co Ltd | Multilayer wiring board and manufacture thereof |
DE4017181C2 (en) * | 1990-05-29 | 1998-08-27 | Daimler Benz Aerospace Ag | Electrical component |
DE69207507T2 (en) * | 1991-02-25 | 1996-09-12 | Sumitomo Electric Industries | PCB |
US5449955A (en) * | 1994-04-01 | 1995-09-12 | At&T Corp. | Film circuit metal system for use with bumped IC packages |
DE10004453B4 (en) * | 2000-02-03 | 2009-08-13 | Ust Umweltsensortechnik Gmbh | Electric fuse and method for its manufacture |
JP2003101222A (en) * | 2001-09-21 | 2003-04-04 | Sony Corp | Thin film circuit substrate unit and its manufacturing method |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE7106898U (en) * | 1970-03-06 | 1971-05-27 | Motorola Inc | Integrated hybrid circuit |
-
1975
- 1975-12-05 DE DE2554691A patent/DE2554691C2/en not_active Expired
- 1975-12-08 GB GB50291/75A patent/GB1527108A/en not_active Expired
- 1975-12-09 IT IT70022/75A patent/IT1051461B/en active
- 1975-12-09 NL NLAANVRAGE7514325,A patent/NL185249C/en not_active IP Right Cessation
- 1975-12-09 FR FR7537607A patent/FR2294610A1/en active Granted
- 1975-12-09 SE SE7513853A patent/SE427400B/en not_active IP Right Cessation
- 1975-12-10 ES ES443346A patent/ES443346A1/en not_active Expired
- 1975-12-10 JP JP50146449A patent/JPS6032311B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
NL7514325A (en) | 1976-06-14 |
GB1527108A (en) | 1978-10-04 |
ES443346A1 (en) | 1977-08-16 |
NL185249C (en) | 1990-02-16 |
FR2294610B1 (en) | 1980-03-21 |
JPS6032311B2 (en) | 1985-07-27 |
NL185249B (en) | 1989-09-18 |
DE2554691C2 (en) | 1982-11-18 |
FR2294610A1 (en) | 1976-07-09 |
DE2554691A1 (en) | 1976-06-16 |
SE427400B (en) | 1983-03-28 |
IT1051461B (en) | 1981-04-21 |
JPS51101864A (en) | 1976-09-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
SE7513853L (en) | PROCEDURE FOR MANUFACTURE OF ELECTRICAL CONDUCTORS ON AN INSULATING SUBSTRATE | |
US3256588A (en) | Method of fabricating thin film r-c circuits on single substrate | |
US3386894A (en) | Formation of metallic contacts | |
US2834723A (en) | Method of electroplating printed circuits | |
GB1269973A (en) | Method of forming a thin film pattern of metal or metal compounds | |
GB1125394A (en) | Thin-film electrical components | |
GB1434766A (en) | Micro-miniature electronic components | |
US3781610A (en) | Thin film circuits and method for manufacture | |
GB1424980A (en) | Thin-film electrical circuits | |
US3337426A (en) | Process for fabricating electrical circuits | |
US3890177A (en) | Technique for the fabrication of air-isolated crossovers | |
US3775838A (en) | Integrated circuit package and construction technique | |
US3387952A (en) | Multilayer thin-film coated substrate with metallic parting layer to permit selectiveequential etching | |
GB1354956A (en) | Process for making a thin film network | |
US3872356A (en) | Thin film electronic circuit unit and method of making the same | |
US3778689A (en) | Thin film capacitors and method for manufacture | |
US3487522A (en) | Multilayered thin-film intermediates employing parting layers to permit selective,sequential etching | |
GB1241574A (en) | A method of plating conductive metals on film-forming materials | |
US3787961A (en) | Chip-shaped, non-polarized solid state electrolytic capacitor and method of making same | |
US3324362A (en) | Electrical components formed by thin metallic form on solid substrates | |
US3398032A (en) | Method of making cermet resistors by etching | |
JPH05267025A (en) | Manufacture of chip part and manufacture of electronic part | |
JPH0245996A (en) | Manufacture of hybrid integrated circuit | |
US3634202A (en) | Process for the production of thick film conductors and circuits incorporating such conductors | |
US3554876A (en) | Process for etching and electro plating a printed circuit |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
NAL | Patent in force |
Ref document number: 7513853-7 Format of ref document f/p: F |
|
NUG | Patent has lapsed |
Ref document number: 7513853-7 Format of ref document f/p: F |