JPS5729016A - Large scale optical integrated circuit - Google Patents

Large scale optical integrated circuit

Info

Publication number
JPS5729016A
JPS5729016A JP10345880A JP10345880A JPS5729016A JP S5729016 A JPS5729016 A JP S5729016A JP 10345880 A JP10345880 A JP 10345880A JP 10345880 A JP10345880 A JP 10345880A JP S5729016 A JPS5729016 A JP S5729016A
Authority
JP
Japan
Prior art keywords
optical
large scale
ics
scale optical
constitution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10345880A
Other languages
Japanese (ja)
Inventor
Eizo Miyauchi
Tetsuo Horimatsu
Takao Uchiumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10345880A priority Critical patent/JPS5729016A/en
Publication of JPS5729016A publication Critical patent/JPS5729016A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004—Combinations of two or more optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Semiconductor Lasers (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

PURPOSE:To form a large scale optical IC as a whole by coupling plural small scales ICs by means of optical waveguides having active or passive functions. CONSTITUTION:Plural optical ICs 2-8 are coupled by means of optical waveguides 9,10. These optical waveguides are formed by vapor-deposited metallic films on an optical crystal substrate by lithographic techniques used for production of conventional ICs, and heating these vapor-deposited films thereby diffusing the molecules of the metal into the optical crystal substrate. When there is a right-angle bent part 13 in the waveguide 12 coupling the IC2 and the IC8, a reflection part is formed in said part 13 to reduce an optical transmission loss. Namely, the angle of the part 13 is chamfered 19, and ions are implanted thereto from the direction perpendicular to the plane of the figure to form a metallic film, thereby forming a mirror. With such constitution, the large scale optical IC as a whole is formed.
JP10345880A 1980-07-28 1980-07-28 Large scale optical integrated circuit Pending JPS5729016A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10345880A JPS5729016A (en) 1980-07-28 1980-07-28 Large scale optical integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10345880A JPS5729016A (en) 1980-07-28 1980-07-28 Large scale optical integrated circuit

Publications (1)

Publication Number Publication Date
JPS5729016A true JPS5729016A (en) 1982-02-16

Family

ID=14354573

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10345880A Pending JPS5729016A (en) 1980-07-28 1980-07-28 Large scale optical integrated circuit

Country Status (1)

Country Link
JP (1) JPS5729016A (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS597910A (en) * 1982-07-07 1984-01-17 Fujitsu Ltd Manufacture of reflecting surface of light guide
JPS59143109A (en) * 1983-02-04 1984-08-16 Sumitomo Electric Ind Ltd Optical integrated circuit
JPS59158104U (en) * 1983-04-08 1984-10-23 株式会社日立製作所 Optical backboard substrate
JPS61144608A (en) * 1984-12-18 1986-07-02 Omron Tateisi Electronics Co Three-dimensional optical circuit
JPS61147204A (en) * 1984-12-20 1986-07-04 Omron Tateisi Electronics Co 3-pimensional optical circuit
JPS61156871A (en) * 1984-12-28 1986-07-16 Nec Corp Planar photo printed board
JPS61156870A (en) * 1984-12-28 1986-07-16 Nec Corp Planar photo printed board
JPS61187268A (en) * 1985-02-14 1986-08-20 Matsushita Electric Ind Co Ltd Photoelectric conversion integrated circuit
JPS61284706A (en) * 1985-06-12 1986-12-15 Hitachi Ltd Optical device
JPS62181467A (en) * 1986-02-05 1987-08-08 Hitachi Ltd Semiconductor device

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS597910A (en) * 1982-07-07 1984-01-17 Fujitsu Ltd Manufacture of reflecting surface of light guide
JPS59143109A (en) * 1983-02-04 1984-08-16 Sumitomo Electric Ind Ltd Optical integrated circuit
JPS59158104U (en) * 1983-04-08 1984-10-23 株式会社日立製作所 Optical backboard substrate
JPS61144608A (en) * 1984-12-18 1986-07-02 Omron Tateisi Electronics Co Three-dimensional optical circuit
JPS61147204A (en) * 1984-12-20 1986-07-04 Omron Tateisi Electronics Co 3-pimensional optical circuit
JPS61156871A (en) * 1984-12-28 1986-07-16 Nec Corp Planar photo printed board
JPS61156870A (en) * 1984-12-28 1986-07-16 Nec Corp Planar photo printed board
JPS61187268A (en) * 1985-02-14 1986-08-20 Matsushita Electric Ind Co Ltd Photoelectric conversion integrated circuit
JPS61284706A (en) * 1985-06-12 1986-12-15 Hitachi Ltd Optical device
JPS62181467A (en) * 1986-02-05 1987-08-08 Hitachi Ltd Semiconductor device

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