JPS61156871A - Planar photo printed board - Google Patents

Planar photo printed board

Info

Publication number
JPS61156871A
JPS61156871A JP27748684A JP27748684A JPS61156871A JP S61156871 A JPS61156871 A JP S61156871A JP 27748684 A JP27748684 A JP 27748684A JP 27748684 A JP27748684 A JP 27748684A JP S61156871 A JPS61156871 A JP S61156871A
Authority
JP
Japan
Prior art keywords
optical
electronic
control signal
signal
optical waveguides
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27748684A
Other languages
Japanese (ja)
Inventor
Toshihiko Kitano
北野 利彦
Mitsuto Sakaguchi
阪口 光人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP27748684A priority Critical patent/JPS61156871A/en
Publication of JPS61156871A publication Critical patent/JPS61156871A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004Combinations of two or more optical elements

Abstract

PURPOSE:To realize the titled board of high-density mounting by a method wherein a planar photo printed board provided with many electronic-photo circuit elements on the substrate is so constructed as to reduce the intersection of main signal wirings with control signal wirings in such a case. CONSTITUTION:Many electronic-photo circuit elements 2 are mounted on a dielectric or semiconductor substrate 1. These electronic-photo circuit elements are connected to one another with optical waveguides 3, 4 and electric wirings 5. Of these components, the optical waveguides 3 are for photo control signal propagation, and the optical waveguides 4 for photo main signal propagation; further, the electric wirings 5 for electric main signal propagation. In this case, only if consideration is made so that the electric wirings may not intersect with the optical waveguides, any way of intersection between the optical waveguides for control signal and main signal is not problem; accordingly, the location of each of wirings and optical waveguides is extremely facilitated.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、元プリント板上に設けられた複数個の電子・
光回路素子に、光制御信号を用いる平面光プリント板に
関するものである。
DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention provides a plurality of electronic and
The present invention relates to a flat optical printed board that uses optical control signals for optical circuit elements.

(従来技術とその問題点) 発光素子、受光素子、光導波路及び電子回路等を誘電体
基板もしくは半導体基板上に搭載した複合光プリント板
は、現在の電子計算機にくらぺはるかく高速化が可能な
光コンビ為−夕を構成する上でのキイテクノロジーとし
て最近とくにその開発の必要性が強調されている。これ
に関しては1984年7月にジェー・ダブリ1−・グツ
ドマン(J。
(Prior art and its problems) Composite optical printed circuit boards, in which light-emitting elements, light-receiving elements, optical waveguides, electronic circuits, etc. are mounted on dielectric substrates or semiconductor substrates, can run much faster than current electronic computers. Recently, the need for its development has been particularly emphasized as a key technology in constructing a light combination. Regarding this, in July 1984, J.D. Gutsudman (J.

W、 Q06dm!n )等が、オプティカル・イノタ
ー・コネクシ璽ン・フォー・ブイエルニスディ・システ
ムズ(0ptical Interconnectio
n forVLSI Systems )と題する論文
をアイトルプルイ(IEFiE)のプ四シーディ/ゲス
(Proceedings)第850頁に発表しておシ
、光素子、電子回路を複合化させ搭載した平面・光プリ
ント板をよシ広義な意味も含めて光インターコネクシー
/と呼びその構成の基本概念などを明確化している。こ
の中で平面光プリント板上に設けられた各種光素子及び
電子回路素子にクロック信号等の制御信号をいかに印加
するかがのべられている0第5図は前掲の論文で示され
ている一例で、誘電体もしくは半導体で構成されている
平面光プリント板51上に光導波路52が複数本設けら
れておシ、この光導波路に光源53よシの光制御信号が
印加される。
W, Q06dm! n), etc., are the Optical Interconnection Co., Ltd.
He published a paper titled ``N for VLSI Systems'' on page 850 of Proceedings of IEFiE, in which he developed a planar and optical printed circuit board equipped with a composite of optical elements and electronic circuits. It is called optical interconnection in a broader sense, and the basic concept of its configuration is clarified. Figure 5, which describes how to apply control signals such as clock signals to various optical elements and electronic circuit elements provided on a flat optical printed board, is shown in the above-mentioned paper. In one example, a plurality of optical waveguides 52 are provided on a flat optical printed circuit board 51 made of a dielectric or a semiconductor, and a light control signal from a light source 53 is applied to the optical waveguides.

この光制御信号は、光導波路52ft伝搬するが途中で
設けられている方向性結合器54により、各々の素子へ
分配される0この第5図は、光制御信号のみを示した岡
であるが、平面光プリント板上に多数の電子・光回路素
子が設けられ主信号用配線と制御信号用配線が複IK交
錯するような場合については、どのようにすればよいか
その具体策について全く述べられていない。
This optical control signal propagates through a 52-ft optical waveguide, and is distributed to each element by a directional coupler 54 provided along the way. Although FIG. 5 only shows the optical control signal, , in the case where a large number of electronic/optical circuit elements are installed on a flat optical printed circuit board and the main signal wiring and control signal wiring intersect with multiple IKs, what should be done is explained in detail. It has not been done.

(発明の目的) 本発明は、基板上に多数の電子・光回路素子を設けた平
面光プリント板において主信号用の配線と制御信号用の
配線とが交錯する場合その交錯を出きる限り少なくした
構成とし、高密度実装の平面光プリント板を実現するこ
とを目的としている。
(Objective of the Invention) The present invention aims to minimize the intersection of main signal wiring and control signal wiring in a flat optical printed circuit board in which a large number of electronic/optical circuit elements are provided on the board. The aim is to realize a planar optical printed circuit board with high-density packaging.

(発明の構成) 本発明の構成は、誘電体基板もしくは半導体基板上に複
数個の電子光回路素子を設け、これらの電子光回路素子
を互いに、前記基板上に設けられた光主信号伝搬用光導
波路、電気主信号用電気配線及び光制御信号伝搬用光導
波路で接続せしめたことに特徴がある。
(Structure of the Invention) The structure of the present invention is that a plurality of electronic optical circuit elements are provided on a dielectric substrate or a semiconductor substrate, and these electronic optical circuit elements are connected to a main optical signal propagation device provided on the substrate. It is characterized in that it is connected by an optical waveguide, electrical wiring for electrical main signals, and an optical waveguide for propagating optical control signals.

このような構成で、特に、複数個の電子・光回路素子を
制御するための光制御信号を基板上に設けられた少なく
とも1点で受波し、この光制御信号を受波点よシ各々の
電子・光回路素子間と連結された光導波路によシ分配せ
しめる構成とすると光制御信号が同時刻に各電子・光回
路素子に伝達されるため各素子の制御性や処理能力の向
上という利点がある。
In particular, with such a configuration, an optical control signal for controlling a plurality of electronic/optical circuit elements is received at at least one point provided on the substrate, and this optical control signal is transmitted from the receiving point to each of the points. If the optical control signal is distributed to each electronic/optical circuit element by an optical waveguide connected to the other electronic/optical circuit elements, the optical control signal will be transmitted to each electronic/optical circuit element at the same time, which will improve the controllability and processing capacity of each element. There are advantages.

(実施例) 第1図は本発明になる平面光プリント板の一実施例を示
す斜視図で、誘電体基板メ名いは半導体基板1上に複数
個、第1図では9個の電子・光回路素子2が搭載されて
いる0これらの電子・光回路素子は光導波路3および4
電気配線5で各々結ばれている口このうち光導波路3は
光制御信号伝搬用、光導波路4は光主信号伝搬用、さら
に電気配線5は電気主信号用である。この場合、主信号
とは電子・光回路素子に入力した信号が何らかの変換を
うけて再び信号線に送シ出されてくるものを言い、制御
信号とは電子・光回路素子の中の発光素子、受光素子あ
るいは電子回路の動作の制御用に使われるものでFL例
えばクロ、り信号のようなもので、一般にはこの信号は
電子・光回路素子の中で消滅するケースが多い0 第1図の実施例では、光制御信号は制御信号伝搬用光導
波路3の各点よシY分岐光導波路によシ′ 各々の電子
・光回路、素子に入力されている。この場合、この制御
信号用の光導波路3は、光主信号用の光導波路4と交差
している。一般に2本の光導波路が交差している時、狭
い方の交叉角θが約10度以上あれば両導波路を伝搬す
る光の互いの導波光に対するクロストークは−40dB
以下とな一方電気配線と光導波路が交差すると、電極が
存在する光導波路上でTI、TM間のモード変換が生じ
たり、又表面の電極のつき具合により光導波路を伝搬す
る光が損失を受けたシし、種々の問題が発生する可能性
が多い。したがりて第1図の実施例のように制御信号を
光信号とすれば、基板上に設けられた複数の電子・光回
路を電気配線及び−光導波路で結ぶ際に電気配線と先導
波路が交差しない様配慮しさえすれば、後は制御信号用
、及び主信号用の光導波路がどのように交わっても問題
とならないため各配線、光導波路の位置の設定が極めて
容易となる特長を有している。
(Embodiment) FIG. 1 is a perspective view showing an embodiment of a flat optical printed board according to the present invention, in which a plurality of electron beams, nine in FIG. These electronic/optical circuit elements are mounted on optical waveguides 3 and 4.
Among the ports connected by electrical wiring 5, the optical waveguide 3 is for optical control signal propagation, the optical waveguide 4 is for optical main signal propagation, and the electrical wiring 5 is for electrical main signal. In this case, the main signal refers to the signal input to the electronic/optical circuit element that undergoes some conversion and is sent out again to the signal line, and the control signal refers to the signal input to the electronic/optical circuit element. , a signal used to control the operation of a light-receiving element or an electronic circuit, such as a black signal.Generally, this signal often disappears within the electronic/optical circuit element0. In this embodiment, the optical control signal is input from each point of the optical waveguide 3 for control signal propagation to the Y-branch optical waveguide to each electronic/optical circuit and element. In this case, the optical waveguide 3 for the control signal crosses the optical waveguide 4 for the optical main signal. Generally, when two optical waveguides intersect, if the intersection angle θ of the narrower one is approximately 10 degrees or more, the crosstalk between the light propagating through both waveguides and the mutually guided light is -40 dB.
On the other hand, when electrical wiring and optical waveguides intersect, mode conversion between TI and TM may occur on the optical waveguide where electrodes are present, and the light propagating through the optical waveguide may be lost due to the contact of the electrodes on the surface. However, there are many possibilities for various problems to occur. Therefore, if the control signal is an optical signal as in the embodiment shown in FIG. As long as you take care not to cross each other, it doesn't matter how the control signal and main signal optical waveguides intersect, making it extremely easy to set the position of each wiring and optical waveguide. are doing.

第1図の場合とは反対に、もし制御信号用にも電気配線
を用いると、主信号用及び制御信号用の両光導波路を、
主信号、制御信号両用の電気配線と交差することのない
ように位置を設定せねばならず、極めてその設定が困難
となる。′第2図は、第1図の実施例の平面光プリント
板に用いられている各素子の具体例を示す図で、第2図
(a)は光導波路部、第2図(blは電子・光回路素子
部でらる0第2図(a)に示す光導波路部では基板11
t−例えば8iとするとSi表面に8i01層12を形
成し、その中に8i01にBtus ・Ge01 ft
ドープして埋めこむような形で光導波路部13を形成す
るO 第2図(blに示す電子・光回路素子部は、光入力信号
全光検出器で受光し、電気信号に変換した後3個のFE
Tで増幅し、再び半導体レーザで光信号に直し、出力す
るモノリシック光中継器の例でおる。光入力信号は、光
導波路14を伝搬し、光検出部もかねているFBT 1
6のゲー) 16cへ入力されるコこの入力光は電気信
号に変換された後。
Contrary to the case in Figure 1, if electrical wiring is used for control signals as well, both the main signal and control signal optical waveguides will be
The position must be set so that it does not intersect with electrical wiring for both main and control signals, which is extremely difficult. 'Figure 2 is a diagram showing a specific example of each element used in the flat optical printed circuit board of the embodiment shown in Figure 1. Figure 2 (a) is an optical waveguide section;・In the optical circuit element part, the substrate 11 in the optical waveguide part shown in FIG.
t - For example, if it is 8i, an 8i01 layer 12 is formed on the Si surface, and Btus/Ge01 ft is formed on the 8i01 in it.
The optical waveguide section 13 is formed in a doped and buried manner.The electronic/optical circuit element section shown in FIG. FE
This is an example of a monolithic optical repeater that amplifies the signal with T, converts it into an optical signal again with a semiconductor laser, and outputs it. The optical input signal propagates through the optical waveguide 14, and the FBT 1 also serves as a photodetector.
6) This input light is input to 16c after being converted into an electrical signal.

3個のFET15.t6. 17で増巾され、半導体レ
ーザ18へ印加される。半導体レーザより再び光に変換
された信号は、光導波路19により。
3 FETs15. t6. The signal is amplified at 17 and applied to the semiconductor laser 18 . The signal converted back into light from the semiconductor laser is passed through the optical waveguide 19.

さらに次の電子・光回路素子部へ転送される。この時、
信号のクロックをとったシする制御信号は光導波路20
を伝搬、する光信号で長兄られるが、光の光制御信号は
、光検出器21で電気信号に変換されF E T l’
5のゲ−)15cへ印加される。又電気信号は信号線2
2.23よ、りFET15のソース15a及び、FET
17のゲート17c等へ接続され、降接する電子・光回
路素子へ供給されている。尚、15a 、  16a 
、  17aは各FETのソース、15b 、  16
b 、  17bはドレインを示している。
It is further transferred to the next electronic/optical circuit element section. At this time,
The control signal that clocks the signal is transmitted through the optical waveguide 20.
The optical control signal of the light is converted into an electrical signal by the photodetector 21 and F E T l'
5) is applied to the gate 15c. Also, the electrical signal is signal line 2
From 2.23, the source 15a of FET 15 and the FET
It is connected to the gate 17c of No. 17, etc., and is supplied to the descending electronic/optical circuit elements. In addition, 15a, 16a
, 17a is the source of each FET, 15b, 16
b, 17b indicates the drain.

第1図に示す実施例では、光主信号用光導波路と光制御
信号用光導波路が交差している場合についてのべたが、
第3図に示すように、いずれか一方が基板の中に埋めこ
まれた場合でも同様に用いることが出来る。すなわち基
板31に光導波路部32t−一部分埋めこみ、電子・光
回路素子33のところで表面上へもちあげ素子内部に光
信号を入力するロ一方他の光導波路34は、基板表面上
に設ける。実際は、平面部と埋めこみ部を組み合わせる
ことによりより複雑な光回路構成が可能となる。尚、基
板の中に光導波路を埋め込む方法としては、たとえば、
屈折率の若干高い’rt+部を溶融ガラスに拡散し、次
に電界をかけることによシこのTt”層をガラス内部に
引りばシ込み、さらに表面に屈折率のよい低いに+など
を拡散することによシ容易に実現できる。
In the embodiment shown in FIG. 1, the case where the optical main signal optical waveguide and the optical control signal optical waveguide intersect is described.
As shown in FIG. 3, it can be used in the same way even if either one is embedded in the substrate. That is, a part of the optical waveguide section 32t is embedded in the substrate 31 and lifted onto the surface at the electronic/optical circuit element 33 to input an optical signal into the element, while the other optical waveguide 34 is provided on the surface of the substrate. In fact, a more complex optical circuit configuration is possible by combining the flat part and the buried part. In addition, as a method of embedding an optical waveguide in a substrate, for example,
The 'rt+' layer with a slightly higher refractive index is diffused into the molten glass, and then by applying an electric field, this Tt layer is drawn into the glass and embedded. This can be easily achieved by diffusion.

第4図は本発明になる平面光プリント板の他の実施例金
示す斜視図で、誘電体もしくは半導体からなる基板41
上に、複数個の電子・光回路素子42が搭載されておシ
、これらの素子は光主信号伝搬用光導波路43.電気主
信号用配線44で結ばれている。光制御信号伝搬用の光
導波路45は、基板上に設けられた光制御信号発生器4
6から出力される光信号を、各々の電子光回路素子へ入
力せしめるように各々の点でY分岐を有している口この
ような構成では、各々の電子光回路素子は。
FIG. 4 is a perspective view showing another embodiment of the flat optical printed circuit board according to the present invention, in which a substrate 41 made of a dielectric or a semiconductor
A plurality of electronic/optical circuit elements 42 are mounted on the top, and these elements are connected to an optical waveguide 43 for optical main signal propagation. They are connected by electrical main signal wiring 44. The optical waveguide 45 for optical control signal propagation is connected to the optical control signal generator 4 provided on the substrate.
In such a configuration, each electronic optical circuit element has a Y branch at each point so that the optical signal outputted from the electronic optical circuit element 6 is inputted to each electronic optical circuit element.

共通の制御信号でコントロールされることになシ、極め
て有機的に動作することが出来るようになる口この場合
、光主信号用と、光制御用の各光導波路は交叉している
が、このように1ケ所から出力される光制御信号全光導
波路で何ケ所にも分配するような使い方では、とくにこ
の交叉が多く起こシ得るものであるが1本実施例のよう
に制御信号を光信号に限定すれば容易にこの問題を解決
することが出来る様になる。
In this case, the optical waveguides for the main optical signal and the optical waveguide for optical control intersect, but in this case, the optical waveguides for the main optical signal and the optical waveguide for optical control intersect. When an optical control signal is output from one location and distributed to multiple locations using an all-optical waveguide, this crossover can occur particularly frequently. This problem can be easily solved by limiting it to .

(発明の効果) 以上本発明の実施例につき説明を行なってきたが、本発
明により、誘電体基板もしくは半導体基板上に構成され
た多数の電子・光回路素子を、主信号線及び制御信号線
で結ぶ時に、極めてその配線の設計が容易にできるよう
になシ、シたがってその実現性がひやく的に高くなった
0又これにより電子計算機よりも信号処理速度の格段に
早い。
(Effects of the Invention) The embodiments of the present invention have been described above. According to the present invention, a large number of electronic/optical circuit elements configured on a dielectric substrate or a semiconductor substrate can be connected to main signal lines and control signal lines. It has become extremely easy to design the wiring when connecting the wires, and therefore the feasibility has become much higher.Also, the signal processing speed is much faster than that of an electronic computer.

光コンビ為−夕の実現がよシ可能となる〇尚1本実施例
では、光主信号月光導波路と光制御信号用光導波路が交
わる場合について説明したが、電子・光回路素子の数が
少なく、互いに交わらせなくても構成できる場合も、本
特許請求の範囲に含まれるのは当然である0
This makes it possible to realize optical combinations.1.In this embodiment, the case where the optical main signal waveguide and the optical control signal optical waveguide intersect is explained, but if the number of electronic/optical circuit elements is Of course, even if the number of elements is small and can be configured without intersecting each other, it is also included in the scope of this patent claim.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明になる平面・光プリント板の一実施例を
示す斜視図である。 1 基 板、2 電子・光回路素子、3 光制御信号用
光導波路、4 光主信号月光導波路、5電気生傷号用配
線 第2図は本発明になる平面・元プリント板の一実施例で
使われた各素子の詳細図で、第2図(a)は光導波路、
第2図(b)は電子光回路素子部である〇118i基板
、14. 19. 20  光導波路、12 8i0x
層、15,16.17  FETトランジスタ、13 
 B+02+B!O@−Ge02.18 半導体レーザ
、22,23  電気配線 第3図は、本実施例で使用可能な埋込み光導波路の例を
示す図である。 31 基 板、33 電子光回路素子 32゜34 光
導波路 第4図は本発明になる平面光プリント板の他の実施例を
示す斜視図である。 41 基 板、42 電子光回路、43 光主信号用光
導波路、44 電気主信号用配線、45元制御信号用光
導波路、46 光制御信号発生器第5図は従来の平面光
プリント板の斜視図でちる。 51 平面光プリント板、52 光導波路、’;1’l
  図 1: 基板 5:電気主信号用配線 第2図 +1:Si基板     +4.19,20:光導波路
12 : SiO2層     +5.16.17:F
ETトラジスタ13: SiO>+8203・GeO2
18:半導体レーザ22.23:’電気配線 73図 31、基板 32.34:光導波路 33: 電子光回路素子
FIG. 1 is a perspective view showing an embodiment of a flat optical printed board according to the present invention. 1 Substrate, 2 Electronic/Optical Circuit Element, 3 Optical Waveguide for Optical Control Signal, 4 Optical Main Signal Moonlight Waveguide, 5 Wiring for Electrical Signal Figure 2 is an embodiment of the flat/original printed board according to the present invention. Figure 2 (a) is a detailed diagram of each element used in the optical waveguide,
FIG. 2(b) shows an 〇118i substrate, 14. which is an electronic optical circuit element section. 19. 20 optical waveguide, 12 8i0x
Layer, 15, 16.17 FET transistor, 13
B+02+B! O@-Ge02.18 semiconductor laser, 22, 23 Electrical wiring FIG. 3 is a diagram showing an example of a buried optical waveguide that can be used in this embodiment. 31 Substrate, 33 Electronic optical circuit element 32° 34 Optical waveguide FIG. 4 is a perspective view showing another embodiment of the flat optical printed board according to the present invention. 41 Substrate, 42 Electronic optical circuit, 43 Optical waveguide for optical main signal, 44 Wiring for electric main signal, 45 Optical waveguide for original control signal, 46 Optical control signal generator. Figure 5 is a perspective view of a conventional flat optical printed circuit board. Illustrated. 51 Planar optical printed board, 52 Optical waveguide, ';1'l
Figure 1: Substrate 5: Electrical main signal wiring Figure 2 +1: Si substrate +4.19, 20: Optical waveguide 12: SiO2 layer +5.16.17: F
ET transistor 13: SiO>+8203・GeO2
18: Semiconductor laser 22. 23: 'Electrical wiring 73 Figure 31, substrate 32. 34: Optical waveguide 33: Electronic optical circuit element

Claims (1)

【特許請求の範囲】[Claims] 誘電体基体もしくは半導体基板上に複数個の電子光回路
素子を設け、これらの電子光回路素子を互いに、前記基
板上に設けられた光主信号伝搬用光導波路、電気主信号
用電気配線及び光制御信号伝搬用光導波路で接続せしめ
たことを特徴とする平面光プリント板
A plurality of electronic optical circuit elements are provided on a dielectric substrate or a semiconductor substrate, and these electronic optical circuit elements are connected to each other by an optical waveguide for optical main signal propagation provided on the substrate, electrical wiring for electrical main signal, and optical A flat optical printed board characterized by being connected by an optical waveguide for control signal propagation.
JP27748684A 1984-12-28 1984-12-28 Planar photo printed board Pending JPS61156871A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27748684A JPS61156871A (en) 1984-12-28 1984-12-28 Planar photo printed board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27748684A JPS61156871A (en) 1984-12-28 1984-12-28 Planar photo printed board

Publications (1)

Publication Number Publication Date
JPS61156871A true JPS61156871A (en) 1986-07-16

Family

ID=17584261

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27748684A Pending JPS61156871A (en) 1984-12-28 1984-12-28 Planar photo printed board

Country Status (1)

Country Link
JP (1) JPS61156871A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01269903A (en) * 1988-04-20 1989-10-27 Nec Corp Multilayered wiring substrate
US5627923A (en) * 1993-09-16 1997-05-06 Hitachi, Ltd. Three-dimensional opto-electric integrated circuit using optical wiring

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5729016A (en) * 1980-07-28 1982-02-16 Fujitsu Ltd Large scale optical integrated circuit
JPS5731187A (en) * 1980-07-31 1982-02-19 Fujitsu Ltd Coupling method for photointegrated circuit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5729016A (en) * 1980-07-28 1982-02-16 Fujitsu Ltd Large scale optical integrated circuit
JPS5731187A (en) * 1980-07-31 1982-02-19 Fujitsu Ltd Coupling method for photointegrated circuit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01269903A (en) * 1988-04-20 1989-10-27 Nec Corp Multilayered wiring substrate
US5627923A (en) * 1993-09-16 1997-05-06 Hitachi, Ltd. Three-dimensional opto-electric integrated circuit using optical wiring

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