JPS62181467A - Semiconductor device - Google Patents

Abstract

PURPOSE:To contrive the increase of integration of elements and the reduction of a signal transmission time by performing signal transmission in a semiconductor integrated electronic circuit by use of light partly or wholly. CONSTITUTION:On a circuit board 3 comprising an optical waveguide network 1, an integrated electronic device 2 having a photoelectric conversion function is connected while bringing its light input and output terminals in accordance with said optical waveguide 1 so as to attain mutual signal transmission. At this time, a dielectric ceramics is used for the circuit board 3. For the optical waveguide 1, an optical waveguide consisting of multi-component glass is formed by a usual technique for forming a glass thin film and a pattern forming technique by use of a photoresist. By this constitution, a wiring area can be cut off 50% in comparison with the case of only a conventional electric wiring and also the signal transmission of 10GHz becomes easy.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a semiconductor device comprising an electronic circuit that easily and quickly transmits signals between elements or integrated elements [Prior Art] In recent years, semiconductor devices have been developed. Advances in process technology have made it possible to produce extremely high-density integrated devices.

However, the high integration of devices has made the signal transmission mechanism between the devices complicated, and the signal processing time has come to be regulated by the signal transmission time between the devices and devices rather than the operation time of the devices. To this end, methods have been proposed that use light for signal transmission between devices. (Liu W. Gutsudmann et al.: [Optical Connections in Visual Systems] Eye! - Ripley Publications, Vol. 72, 197
Published July 4th, pp. 850-866) (J, W, Go
odman et al.: “0ptical Interconr
+ections for VLSI SyStems
”Proc, of IERE, Vol 72.July
1.974. (See PR50-P866).

In other words, high! As A multiplication increases, mutual capacitance increases and drive voltage decreases, causing signal crosstalk, and crosstalk due to an increase in the number of interconnections between devices.

[Problem that the invention seeks to solve]

As described above, as elements and devices become more highly integrated and operate at higher speeds, technical measures have become necessary to improve signal transmission performance between elements within an integrated device or between integrated devices.

SUMMARY OF THE INVENTION An object of the present invention is to provide a semiconductor device that achieves high integration of conventional elements and shortens signal transmission time by transmitting signals using light.

[Means for solving problems]

The reason why signal transmission mechanisms become more complex as elements become more highly integrated is due to an increase in the number of wiring lines and an increase in the wiring area. this is,
By using electrons as a means of signal transmission. In order to guide electrons to a fixed location, a potential gradient is necessary, and in order to distinguish one signal from another, it is necessary to isolate the electrons carrying different signals. This means that one wiring is required for one signal. Therefore, as long as electrons are used as a means of signal transmission, it is inevitable that the signal transmission mechanism will become complicated.

The present inventor has invented a method for introducing a signal transmission means into a semiconductor electronic device more effectively than the prior art. However, in the case of light, it is difficult to make the width of a waveguide for transmitting a signal smaller than the wavelength of the signal, and therefore it is difficult to make the waveguide width smaller than the wiring width for electrons. Therefore, the present inventor further invented the use of light having different wavelengths as a means of signal transmission in a semiconductor device. In this case, by identifying the wavelength, it is possible to transmit signals with different wavelengths in one waveguide, and it is also possible to easily recognize where the signal came from, so that light can be transmitted within the waveguide. It has the advantage that there is no need for isolation at all, and a large amount of signals can be transmitted using a single waveguide.

That is, the portion for propagating light can be used commonly for all signals.

[Effect]

FIG. 1 shows an example of a configuration for realizing the above method. That is, a circuit board 3 having an optical waveguide network 1
On the top, an integrated electronic device 2 is connected to the optical waveguide 1 for signal transmission.

The integrated electronic device 2 is an optical/electrical and/or electrical/electrical device.
Needless to say, it includes an optical signal converter.

Further, in FIG. 2, the circuit board 3 has an optical waveguide 1 and an electric wiring 4, and the electric wiring 4 supplies power for driving the integrated device 2. In this case, since the optical waveguide is not affected by electromagnetic noise, the optical waveguide 1 and the electrical wiring 4 may be placed close to each other, and therefore the design of the device becomes extremely easy.

It is also possible to construct a device in which the optical waveguide network 1 of the circuit board 3 and the electrical wiring 4 are configured in multiple layers so that they can cross each other.
As an example, as shown in FIG. 3, a waveguide network 1 was formed on one side of a circuit board 3, and an electric wiring 4 was formed on the other side. The result was a compact, high-performance semiconductor device.

〔Example〕

Embodiments of the present invention will be described below with reference to the drawings.

Embodiment 1 As shown in FIG. 1, an integrated device 2 having a photoelectric conversion function on a circuit board 3 having an optical waveguide network 1 is arranged so that its optical input and output ends coincide with the optical waveguide 1, Connected to allow mutual signal transmission. Here, the circuit board P was made of dielectric ceramics, and the optical waveguide was formed of preformed glass by a normal glass thin film forming method and a pattern forming method using a photoresist. Further, in the integrated electronic device, a light transmitting section consisting of a light emitting diode and a receiving section consisting of a P-N photoreceiver are monolithically incorporated as a photoelectric conversion function using a normal semiconductor process. With this configuration, the wiring area can be reduced by 50% compared to the case where only conventional electrical wiring is used, and the wiring area can be reduced by 10 GH
z signal transmission was easily possible.

Embodiment 2 As shown in FIG. 2, the circuit board 3 had an optical waveguide] and electric wiring 4, so that the electric wiring 4 could supply six components for driving the integrated device 2. Here, the circuit board is made of dielectric ceramics, the optical waveguide is made of multi-component glass as in Example], and the electrical wiring is made of conventional wiring technology using AQ. The wiring area can be reduced by 30% compared to the case where wiring is used.

Example 3 As shown in FIG. 3, an optical waveguide network 1 was formed on one surface of a circuit board 3, and an electrical wiring 4 was formed on the other surface using the method of Example 2. As a result, the wiring area can be reduced by 30% compared to the case where only conventional electrical wiring is used, and a small, high-performance semiconductor device can be created.

[Brief explanation of drawings]

FIG. 1 shows an integrated electronic device on a circuit board having an optical waveguide network for signal transmission with the optical waveguide. Figure 2 is a diagram showing a configuration in which an optical waveguide and electrical wiring are connected to a circuit board;
The figure shows a configuration in which an optical waveguide network is formed on one side of a circuit board and electrical wiring is formed on the other side. 1... Optical waveguide, 2... Integrated electronic device, 3...
Circuit board 3- ωf34 Mr.'fIz mouth 3 l:] g-base coarse +: Heavy heavy tax arrangement 3 Figure 1: Light stop j reverse each, 2: Awaji r1 Ihi, l: 1-a 3: Circuit difference Uncle +: 1 round 52 others green

Claims (1)

[Scope of Claims] 1. A semiconductor device characterized in that part or all of signal transmission in a semiconductor integrated electronic circuit is performed using light. 2. The semiconductor device according to claim 1, wherein the signal transmission is performed using light of different wavelengths. 3. The semiconductor device according to claim 1, wherein the integrated electronic circuit is provided on a circuit board having an optical waveguide. 4. The semiconductor device according to claim 1, wherein the integrated electronic circuit is provided on a circuit board having an optical waveguide and electrical wiring. 5. The semiconductor device according to claim 4, wherein the optical waveguide and the electrical wiring have a portion where their projected images intersect.