JPS5728368A - Manufacture of semiconductor film - Google Patents
Manufacture of semiconductor filmInfo
- Publication number
- JPS5728368A JPS5728368A JP10252980A JP10252980A JPS5728368A JP S5728368 A JPS5728368 A JP S5728368A JP 10252980 A JP10252980 A JP 10252980A JP 10252980 A JP10252980 A JP 10252980A JP S5728368 A JPS5728368 A JP S5728368A
- Authority
- JP
- Japan
- Prior art keywords
- film
- amorphous
- substrate
- light receiving
- wave number
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
- H01J9/233—Manufacture of photoelectric screens or charge-storage screens
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Light Receiving Elements (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Photoreceptors In Electrophotography (AREA)
- Photovoltaic Devices (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10252980A JPS5728368A (en) | 1980-07-28 | 1980-07-28 | Manufacture of semiconductor film |
DE8181303421T DE3174125D1 (en) | 1980-07-28 | 1981-07-24 | Method of producing an image pickup device |
EP81303421A EP0045203B1 (en) | 1980-07-28 | 1981-07-24 | Method of producing an image pickup device |
US06/287,554 US4380557A (en) | 1980-07-28 | 1981-07-28 | Method of production of image pickup device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10252980A JPS5728368A (en) | 1980-07-28 | 1980-07-28 | Manufacture of semiconductor film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5728368A true JPS5728368A (en) | 1982-02-16 |
JPH0234192B2 JPH0234192B2 (ja) | 1990-08-01 |
Family
ID=14329831
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10252980A Granted JPS5728368A (en) | 1980-07-28 | 1980-07-28 | Manufacture of semiconductor film |
Country Status (4)
Country | Link |
---|---|
US (1) | US4380557A (ja) |
EP (1) | EP0045203B1 (ja) |
JP (1) | JPS5728368A (ja) |
DE (1) | DE3174125D1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007327847A (ja) * | 2006-06-07 | 2007-12-20 | Gl Sciences Inc | グラジェント送液方法及び装置 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4517733A (en) * | 1981-01-06 | 1985-05-21 | Fuji Xerox Co., Ltd. | Process for fabricating thin film image pick-up element |
JPS57208181A (en) * | 1981-06-17 | 1982-12-21 | Hitachi Ltd | Manufacture of photoelectric conversion film |
DE3417732A1 (de) * | 1984-05-12 | 1986-07-10 | Leybold-Heraeus GmbH, 5000 Köln | Verfahren zum aufbringen von siliziumhaltigen schichten auf substraten durch katodenzerstaeubung und zerstaeubungskatode zur durchfuehrung des verfahrens |
US4851096A (en) * | 1984-07-07 | 1989-07-25 | Kyocera Corporation | Method for fabricating a magneto-optical recording element |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52122471A (en) * | 1976-03-22 | 1977-10-14 | Rca Corp | Schottky barier semiconductor device |
JPS54150995A (en) * | 1978-05-19 | 1979-11-27 | Hitachi Ltd | Photo detector |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4196438A (en) * | 1976-09-29 | 1980-04-01 | Rca Corporation | Article and device having an amorphous silicon containing a halogen and method of fabrication |
FR2433871A1 (fr) * | 1978-08-18 | 1980-03-14 | Hitachi Ltd | Dispositif de formation d'image a semi-conducteur |
US4237150A (en) * | 1979-04-18 | 1980-12-02 | The United States Of America As Represented By The United States Department Of Energy | Method of producing hydrogenated amorphous silicon film |
-
1980
- 1980-07-28 JP JP10252980A patent/JPS5728368A/ja active Granted
-
1981
- 1981-07-24 DE DE8181303421T patent/DE3174125D1/de not_active Expired
- 1981-07-24 EP EP81303421A patent/EP0045203B1/en not_active Expired
- 1981-07-28 US US06/287,554 patent/US4380557A/en not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52122471A (en) * | 1976-03-22 | 1977-10-14 | Rca Corp | Schottky barier semiconductor device |
JPS54150995A (en) * | 1978-05-19 | 1979-11-27 | Hitachi Ltd | Photo detector |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007327847A (ja) * | 2006-06-07 | 2007-12-20 | Gl Sciences Inc | グラジェント送液方法及び装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0234192B2 (ja) | 1990-08-01 |
EP0045203A2 (en) | 1982-02-03 |
EP0045203B1 (en) | 1986-03-19 |
EP0045203A3 (en) | 1982-05-19 |
US4380557A (en) | 1983-04-19 |
DE3174125D1 (en) | 1986-04-24 |
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