JPS5728328A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5728328A JPS5728328A JP10345480A JP10345480A JPS5728328A JP S5728328 A JPS5728328 A JP S5728328A JP 10345480 A JP10345480 A JP 10345480A JP 10345480 A JP10345480 A JP 10345480A JP S5728328 A JPS5728328 A JP S5728328A
- Authority
- JP
- Japan
- Prior art keywords
- reaction
- opening
- substrates
- gas
- paddle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10345480A JPS5728328A (en) | 1980-07-28 | 1980-07-28 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10345480A JPS5728328A (en) | 1980-07-28 | 1980-07-28 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5728328A true JPS5728328A (en) | 1982-02-16 |
| JPS6122454B2 JPS6122454B2 (OSRAM) | 1986-05-31 |
Family
ID=14354465
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10345480A Granted JPS5728328A (en) | 1980-07-28 | 1980-07-28 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5728328A (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03297132A (ja) * | 1990-04-16 | 1991-12-27 | Nec Corp | 半導体ウェハの熱処理炉 |
-
1980
- 1980-07-28 JP JP10345480A patent/JPS5728328A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03297132A (ja) * | 1990-04-16 | 1991-12-27 | Nec Corp | 半導体ウェハの熱処理炉 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6122454B2 (OSRAM) | 1986-05-31 |
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