JPS5728222A - Optical detector - Google Patents

Abstract

PURPOSE:To contrive to manufacture a product with higher sensitivity and higher response time by preparing a hot junction on a cavity in the upper layer part and a cold junction on a part except a part on the cavity on a substrate that comprises the upper layer part an insulator having grooves and the under part layer having a cavity formed by a material different from said marerial. CONSTITUTION:On substrate having an insulating film of an order of 1mum, for example, on an Si substrate 1 having an SiO2 film 10, grooves 11 that extend to a cavity 2 and the Si substrate 1 are prepared. On the SiO2 layer 10, belt-shaped rows 12a, 12b of thin film of copper suboxide and titanium oxide are formed on the peripheral part of the grooves 11, one end of each being located on the SiO2 films 10a, 10a' and the other end on the SiO2 film 10b, 10b'. By sputtering SiO2, films 14a, 14b are formed, and further by preparing windows for hot junctions 15a, 15b and for cool junctions 16a, 16b and by evaporating copper, conductors 13a, 13a', 13b, 13b', for connection and electrode parts 17a, 17b are formed. Gold blacks 19a, 19b for light absorption are evaporated on the upper part of the films 10a, 10a', and lead wires 18a, 18b are led out from the electrode parts 17a, 17b. Hereby, a detector with higher sensitiveity and higher response time is completed.