JPS5722068A - Multinozzle plate for jetting of fluid - Google Patents

Multinozzle plate for jetting of fluid

Info

Publication number
JPS5722068A
JPS5722068A JP9563380A JP9563380A JPS5722068A JP S5722068 A JPS5722068 A JP S5722068A JP 9563380 A JP9563380 A JP 9563380A JP 9563380 A JP9563380 A JP 9563380A JP S5722068 A JPS5722068 A JP S5722068A
Authority
JP
Japan
Prior art keywords
gold
multinozzle
plate
jetting
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9563380A
Other languages
Japanese (ja)
Inventor
Takuro Sekiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP9563380A priority Critical patent/JPS5722068A/en
Publication of JPS5722068A publication Critical patent/JPS5722068A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1606—Coating the nozzle area or the ink chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography

Abstract

PURPOSE:To provide a multinozzle plate for jetting of fluid of excellent corrosion resistance and mechanical strength and also of uniform jetting characteristics, which is obtained by providing a gold membrane on an entire surface of a multinozzle produced by anisotropic photoetching of a silicon single crystal substrate. CONSTITUTION:A multinozzle plate 1, on which a plurality of nozzles 4 are formed by anisotropic photoetching of a silicon single crystal substrate, is immersed into a fluoric acid solution to remove a thin oxide membrane, and after being washed by fresh water, a gold membrane 7 is formed on an entire surface of the nozzle plate 1 by vacuum brazing or spattering. Then, the nozzle plate 1 is put into a vacuum furnace to be heated for approximately 30min at a temperature in the neighborhood of 350 deg.C so that a eutectic alloy of gold and silicon is formed on boundary section between silicon and gold.
JP9563380A 1980-07-15 1980-07-15 Multinozzle plate for jetting of fluid Pending JPS5722068A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9563380A JPS5722068A (en) 1980-07-15 1980-07-15 Multinozzle plate for jetting of fluid

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9563380A JPS5722068A (en) 1980-07-15 1980-07-15 Multinozzle plate for jetting of fluid

Publications (1)

Publication Number Publication Date
JPS5722068A true JPS5722068A (en) 1982-02-04

Family

ID=14142917

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9563380A Pending JPS5722068A (en) 1980-07-15 1980-07-15 Multinozzle plate for jetting of fluid

Country Status (1)

Country Link
JP (1) JPS5722068A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6158744A (en) * 1984-08-31 1986-03-26 Canon Inc Orifice plate of ink jet recording head and latter having corresponding orifice plate
US5208606A (en) * 1991-11-21 1993-05-04 Xerox Corporation Directionality of thermal ink jet transducers by front face metalization
US5387440A (en) * 1991-03-28 1995-02-07 Seiko Epson Corporation Nozzle plate for ink jet recording apparatus and method of preparing a said nozzle plate
US6000783A (en) * 1991-03-28 1999-12-14 Seiko Epson Corporation Nozzle plate for ink jet recording apparatus and method of preparing said nozzle plate

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6158744A (en) * 1984-08-31 1986-03-26 Canon Inc Orifice plate of ink jet recording head and latter having corresponding orifice plate
US5387440A (en) * 1991-03-28 1995-02-07 Seiko Epson Corporation Nozzle plate for ink jet recording apparatus and method of preparing a said nozzle plate
US6000783A (en) * 1991-03-28 1999-12-14 Seiko Epson Corporation Nozzle plate for ink jet recording apparatus and method of preparing said nozzle plate
US6016601A (en) * 1991-03-28 2000-01-25 Seiko Epson Corporation Method of preparing the nozzle plate
US6357857B1 (en) 1991-03-28 2002-03-19 Kiyohiko Takemoto Nozzle plate for ink jet recording apparatus and method of preparing said nozzle plate
US5208606A (en) * 1991-11-21 1993-05-04 Xerox Corporation Directionality of thermal ink jet transducers by front face metalization

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