JPS57208441A - Detection system of deviation in pattern position by 2-chip comparison - Google Patents

Detection system of deviation in pattern position by 2-chip comparison

Info

Publication number
JPS57208441A
JPS57208441A JP9384081A JP9384081A JPS57208441A JP S57208441 A JPS57208441 A JP S57208441A JP 9384081 A JP9384081 A JP 9384081A JP 9384081 A JP9384081 A JP 9384081A JP S57208441 A JPS57208441 A JP S57208441A
Authority
JP
Japan
Prior art keywords
axis
deviation
data
chip
addition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9384081A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0254495B2 (enrdf_load_stackoverflow
Inventor
Shinji Hamaguchi
Keiichi Okamoto
Mitsuzo Nakahata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9384081A priority Critical patent/JPS57208441A/ja
Publication of JPS57208441A publication Critical patent/JPS57208441A/ja
Publication of JPH0254495B2 publication Critical patent/JPH0254495B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70605—Workpiece metrology
    • G03F7/70616—Monitoring the printed patterns

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP9384081A 1981-06-19 1981-06-19 Detection system of deviation in pattern position by 2-chip comparison Granted JPS57208441A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9384081A JPS57208441A (en) 1981-06-19 1981-06-19 Detection system of deviation in pattern position by 2-chip comparison

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9384081A JPS57208441A (en) 1981-06-19 1981-06-19 Detection system of deviation in pattern position by 2-chip comparison

Publications (2)

Publication Number Publication Date
JPS57208441A true JPS57208441A (en) 1982-12-21
JPH0254495B2 JPH0254495B2 (enrdf_load_stackoverflow) 1990-11-21

Family

ID=14093585

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9384081A Granted JPS57208441A (en) 1981-06-19 1981-06-19 Detection system of deviation in pattern position by 2-chip comparison

Country Status (1)

Country Link
JP (1) JPS57208441A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03108735A (ja) * 1989-09-22 1991-05-08 Hitachi Ltd 比較検査方法および装置
US5027646A (en) * 1989-07-01 1991-07-02 Ngk Insulators, Ltd. Method of evaluating air-fuel ratio sensor and apparatus therefor
JPH03195955A (ja) * 1989-12-25 1991-08-27 Komu Syst:Kk 画像検査装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5027646A (en) * 1989-07-01 1991-07-02 Ngk Insulators, Ltd. Method of evaluating air-fuel ratio sensor and apparatus therefor
JPH03108735A (ja) * 1989-09-22 1991-05-08 Hitachi Ltd 比較検査方法および装置
JPH03195955A (ja) * 1989-12-25 1991-08-27 Komu Syst:Kk 画像検査装置

Also Published As

Publication number Publication date
JPH0254495B2 (enrdf_load_stackoverflow) 1990-11-21

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