JPS57208155A - Detecting method for pinhole - Google Patents

Detecting method for pinhole

Info

Publication number
JPS57208155A
JPS57208155A JP9342981A JP9342981A JPS57208155A JP S57208155 A JPS57208155 A JP S57208155A JP 9342981 A JP9342981 A JP 9342981A JP 9342981 A JP9342981 A JP 9342981A JP S57208155 A JPS57208155 A JP S57208155A
Authority
JP
Japan
Prior art keywords
film
pinhole
approx
substrate
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9342981A
Other languages
Japanese (ja)
Inventor
Masanobu Ogino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP9342981A priority Critical patent/JPS57208155A/en
Publication of JPS57208155A publication Critical patent/JPS57208155A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To accurately detect a pinhole of a film which includes silicon in a short time by heat treating the film in halogen atmosphere existing with metal and then detecting the etching state of the film. CONSTITUTION:A structure made of a silicon substrate 1 and a dioxidized silicon film 2 having approx. 200Angstrom of thickness is mounted on a quartz port 11, and Cu powder 14 is filled in a crucible 12. The interior of a quarts tube 10 is heated to approx. 900 deg.C, and HCl is flowed for approx. 5min. Thereafter, the etched state of the substrate 1 is detected. Thus, the substrate 1 under the pinhole can be rapidly etched.
JP9342981A 1981-06-17 1981-06-17 Detecting method for pinhole Pending JPS57208155A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9342981A JPS57208155A (en) 1981-06-17 1981-06-17 Detecting method for pinhole

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9342981A JPS57208155A (en) 1981-06-17 1981-06-17 Detecting method for pinhole

Publications (1)

Publication Number Publication Date
JPS57208155A true JPS57208155A (en) 1982-12-21

Family

ID=14082057

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9342981A Pending JPS57208155A (en) 1981-06-17 1981-06-17 Detecting method for pinhole

Country Status (1)

Country Link
JP (1) JPS57208155A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63115331A (en) * 1986-11-04 1988-05-19 Matsushita Electronics Corp Inspection of semiconductor device
US6780436B1 (en) 1999-09-13 2004-08-24 Laboratorios Del Dr. Esteve, Sa Solid oral pharmaceutical formulation of modified release that contains an acid labile benzimidazole compound

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63115331A (en) * 1986-11-04 1988-05-19 Matsushita Electronics Corp Inspection of semiconductor device
US6780436B1 (en) 1999-09-13 2004-08-24 Laboratorios Del Dr. Esteve, Sa Solid oral pharmaceutical formulation of modified release that contains an acid labile benzimidazole compound

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