JPS5443471A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5443471A JPS5443471A JP10883477A JP10883477A JPS5443471A JP S5443471 A JPS5443471 A JP S5443471A JP 10883477 A JP10883477 A JP 10883477A JP 10883477 A JP10883477 A JP 10883477A JP S5443471 A JPS5443471 A JP S5443471A
- Authority
- JP
- Japan
- Prior art keywords
- glass
- jig
- temperature
- substrate
- softening temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To prevent occurrence of the bubbles by holding the Si substrate with the galss powder stacked on under the temperature approximate to the glass softening temperature and then heating the test sample from the substrate side to make the glass flow.
CONSTITUTION: The test sample is placed on jig 14 witnin the electric furnace and then heated up to the glass softening temperature. Heater jig 16 is heated up independently at the place distant from the sample, and the temperature is kept at the galss liquid temperature or higher than that by 5W10°C. Then the glass is kept at the glass softening temperature for 5W30 minutes, and jig 16 is put under jig 14 to make the glass flow from the side where the glass touches the Si substrate. With this method, the glass is fused from the substrate side, so the air between the glass powder is not drawn into the glass film. Thus, a uniform glass protective film can be formed with no bubble contained.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10883477A JPS5443471A (en) | 1977-09-12 | 1977-09-12 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10883477A JPS5443471A (en) | 1977-09-12 | 1977-09-12 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5443471A true JPS5443471A (en) | 1979-04-06 |
Family
ID=14494725
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10883477A Pending JPS5443471A (en) | 1977-09-12 | 1977-09-12 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5443471A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4626417A (en) * | 1983-09-29 | 1986-12-02 | Union Oil Company Of California | Methods for chemically reducing nitrogen oxides |
-
1977
- 1977-09-12 JP JP10883477A patent/JPS5443471A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4626417A (en) * | 1983-09-29 | 1986-12-02 | Union Oil Company Of California | Methods for chemically reducing nitrogen oxides |
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