JPS57203283A - Production of magnetic bubble memory chip - Google Patents
Production of magnetic bubble memory chipInfo
- Publication number
- JPS57203283A JPS57203283A JP8652681A JP8652681A JPS57203283A JP S57203283 A JPS57203283 A JP S57203283A JP 8652681 A JP8652681 A JP 8652681A JP 8652681 A JP8652681 A JP 8652681A JP S57203283 A JPS57203283 A JP S57203283A
- Authority
- JP
- Japan
- Prior art keywords
- layers
- etching
- plasma etching
- memory chip
- production
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: By efficiently remove insulating and Cr2O3 layers respectively at the production of a memory chip by using only a plane parallel plate type plasma etching device and applying plasma etching and spattering methods respectively under different atmospheres to open a window for a terminal electrode part.
CONSTITUTION: In order to form a terminal electrode part, a resist pattern 15 is formed on the surface of an wafer 12 obtained by applying protective layer 8 to the surface of Cr2O3 layers 4, 6 formed on the surfaces of a conductive pattern layer 3 and a driving pattern layer 7 formed on the surface of a nonmagnetic crystal layer 1 through insulating layers 2, 5. The insulating layers 8, 5 of the wafer 12 are etched at first by using "Freon " such as CF4 containing O2 in a plane parallel plate type plasma etching device 9 and then the remaining Cr2O3 layers 4, 6 are removed by the spattering effect under a different atmosphere such as gaseous Ag in the same device 9 to form a termrinal electrode 15. Thus, this method prevent a sample to be moved to another device for etching and improve thr efficiency of etching because of quick etching of respective layers.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8652681A JPS57203283A (en) | 1981-06-05 | 1981-06-05 | Production of magnetic bubble memory chip |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8652681A JPS57203283A (en) | 1981-06-05 | 1981-06-05 | Production of magnetic bubble memory chip |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57203283A true JPS57203283A (en) | 1982-12-13 |
JPS634276B2 JPS634276B2 (en) | 1988-01-28 |
Family
ID=13889429
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8652681A Granted JPS57203283A (en) | 1981-06-05 | 1981-06-05 | Production of magnetic bubble memory chip |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57203283A (en) |
-
1981
- 1981-06-05 JP JP8652681A patent/JPS57203283A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS634276B2 (en) | 1988-01-28 |
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