JPS57200560A - Vessel for source of vaporization for vacuum deposition - Google Patents

Vessel for source of vaporization for vacuum deposition

Info

Publication number
JPS57200560A
JPS57200560A JP8550381A JP8550381A JPS57200560A JP S57200560 A JPS57200560 A JP S57200560A JP 8550381 A JP8550381 A JP 8550381A JP 8550381 A JP8550381 A JP 8550381A JP S57200560 A JPS57200560 A JP S57200560A
Authority
JP
Japan
Prior art keywords
vaporization
vessel
source
vacuum deposition
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8550381A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6138266B2 (enExample
Inventor
Teruo Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Fuji Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd, Fuji Electric Manufacturing Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP8550381A priority Critical patent/JPS57200560A/ja
Publication of JPS57200560A publication Critical patent/JPS57200560A/ja
Publication of JPS6138266B2 publication Critical patent/JPS6138266B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Physical Vapour Deposition (AREA)
JP8550381A 1981-06-03 1981-06-03 Vessel for source of vaporization for vacuum deposition Granted JPS57200560A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8550381A JPS57200560A (en) 1981-06-03 1981-06-03 Vessel for source of vaporization for vacuum deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8550381A JPS57200560A (en) 1981-06-03 1981-06-03 Vessel for source of vaporization for vacuum deposition

Publications (2)

Publication Number Publication Date
JPS57200560A true JPS57200560A (en) 1982-12-08
JPS6138266B2 JPS6138266B2 (enExample) 1986-08-28

Family

ID=13860729

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8550381A Granted JPS57200560A (en) 1981-06-03 1981-06-03 Vessel for source of vaporization for vacuum deposition

Country Status (1)

Country Link
JP (1) JPS57200560A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0900858A1 (de) * 1997-08-18 1999-03-10 Elektroschmelzwerk Kempten GmbH Keramische Flash-Verdampfer
JP2018150581A (ja) * 2017-03-10 2018-09-27 キヤノン株式会社 蒸着装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0446008U (enExample) * 1990-08-24 1992-04-20

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0900858A1 (de) * 1997-08-18 1999-03-10 Elektroschmelzwerk Kempten GmbH Keramische Flash-Verdampfer
US6081652A (en) * 1997-08-18 2000-06-27 Elektroschmelzwerk Kempten Gmbh Ceramic flash TV evaporator
JP2018150581A (ja) * 2017-03-10 2018-09-27 キヤノン株式会社 蒸着装置

Also Published As

Publication number Publication date
JPS6138266B2 (enExample) 1986-08-28

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