JPS57197888A - Method of forming protective film for end surface of semiconductor laser - Google Patents

Method of forming protective film for end surface of semiconductor laser

Info

Publication number
JPS57197888A
JPS57197888A JP8330781A JP8330781A JPS57197888A JP S57197888 A JPS57197888 A JP S57197888A JP 8330781 A JP8330781 A JP 8330781A JP 8330781 A JP8330781 A JP 8330781A JP S57197888 A JPS57197888 A JP S57197888A
Authority
JP
Japan
Prior art keywords
end surface
semiconductor laser
protective film
forming protective
coated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8330781A
Other languages
Japanese (ja)
Inventor
Osamu Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP8330781A priority Critical patent/JPS57197888A/en
Publication of JPS57197888A publication Critical patent/JPS57197888A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/028—Coatings ; Treatment of the laser facets, e.g. etching, passivation layers or reflecting layers

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Drying Of Semiconductors (AREA)
  • Semiconductor Lasers (AREA)

Abstract

PURPOSE:To prevent oxidation of the end surface by a method wherein the light emitting end surface of a semiconductor laser element is etched to be clean through the soft chemical processing, and then a protective film is coated thereon. CONSTITUTION:Ionized Ar<+> gas is made to impinge against a light emitting end surface F of a semiconductor laser element 10, so that the surface F is etched to be clean. Then, an Al2O3 film is coated on the end surface F. Thus coated Al2O3 film functions to prevent oxidation of the surface F.
JP8330781A 1981-05-29 1981-05-29 Method of forming protective film for end surface of semiconductor laser Pending JPS57197888A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8330781A JPS57197888A (en) 1981-05-29 1981-05-29 Method of forming protective film for end surface of semiconductor laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8330781A JPS57197888A (en) 1981-05-29 1981-05-29 Method of forming protective film for end surface of semiconductor laser

Publications (1)

Publication Number Publication Date
JPS57197888A true JPS57197888A (en) 1982-12-04

Family

ID=13798754

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8330781A Pending JPS57197888A (en) 1981-05-29 1981-05-29 Method of forming protective film for end surface of semiconductor laser

Country Status (1)

Country Link
JP (1) JPS57197888A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01205588A (en) * 1988-02-12 1989-08-17 Mitsubishi Electric Corp Semiconductor laser device for laser printer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01205588A (en) * 1988-02-12 1989-08-17 Mitsubishi Electric Corp Semiconductor laser device for laser printer

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