JPS57196793A - Epitaxial growth method - Google Patents

Epitaxial growth method

Info

Publication number
JPS57196793A
JPS57196793A JP8230581A JP8230581A JPS57196793A JP S57196793 A JPS57196793 A JP S57196793A JP 8230581 A JP8230581 A JP 8230581A JP 8230581 A JP8230581 A JP 8230581A JP S57196793 A JPS57196793 A JP S57196793A
Authority
JP
Japan
Prior art keywords
epitaxial growth
substrate
impurities
sub
gaseous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8230581A
Other languages
English (en)
Japanese (ja)
Other versions
JPS621360B2 (enExample
Inventor
Yoshiaki Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP8230581A priority Critical patent/JPS57196793A/ja
Publication of JPS57196793A publication Critical patent/JPS57196793A/ja
Publication of JPS621360B2 publication Critical patent/JPS621360B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP8230581A 1981-05-29 1981-05-29 Epitaxial growth method Granted JPS57196793A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8230581A JPS57196793A (en) 1981-05-29 1981-05-29 Epitaxial growth method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8230581A JPS57196793A (en) 1981-05-29 1981-05-29 Epitaxial growth method

Publications (2)

Publication Number Publication Date
JPS57196793A true JPS57196793A (en) 1982-12-02
JPS621360B2 JPS621360B2 (enExample) 1987-01-13

Family

ID=13770835

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8230581A Granted JPS57196793A (en) 1981-05-29 1981-05-29 Epitaxial growth method

Country Status (1)

Country Link
JP (1) JPS57196793A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6012724A (ja) * 1983-07-01 1985-01-23 Agency Of Ind Science & Technol 化合物半導体の成長方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6012724A (ja) * 1983-07-01 1985-01-23 Agency Of Ind Science & Technol 化合物半導体の成長方法

Also Published As

Publication number Publication date
JPS621360B2 (enExample) 1987-01-13

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