JPS57195753A - Batch-wise continuous type vacuum treatment apparatus - Google Patents

Batch-wise continuous type vacuum treatment apparatus

Info

Publication number
JPS57195753A
JPS57195753A JP8235881A JP8235881A JPS57195753A JP S57195753 A JPS57195753 A JP S57195753A JP 8235881 A JP8235881 A JP 8235881A JP 8235881 A JP8235881 A JP 8235881A JP S57195753 A JPS57195753 A JP S57195753A
Authority
JP
Japan
Prior art keywords
vacuum
treatment
chamber
vacuum chamber
tanks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8235881A
Other languages
English (en)
Japanese (ja)
Other versions
JPS648650B2 (enrdf_load_stackoverflow
Inventor
Susumu Ueno
Hideaki Kamata
Kiyoshi Imada
Yoshitada Hata
Masaya Tokai
Kenichi Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd, Hitachi Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP8235881A priority Critical patent/JPS57195753A/ja
Publication of JPS57195753A publication Critical patent/JPS57195753A/ja
Publication of JPS648650B2 publication Critical patent/JPS648650B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Vapour Deposition (AREA)
JP8235881A 1981-05-29 1981-05-29 Batch-wise continuous type vacuum treatment apparatus Granted JPS57195753A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8235881A JPS57195753A (en) 1981-05-29 1981-05-29 Batch-wise continuous type vacuum treatment apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8235881A JPS57195753A (en) 1981-05-29 1981-05-29 Batch-wise continuous type vacuum treatment apparatus

Publications (2)

Publication Number Publication Date
JPS57195753A true JPS57195753A (en) 1982-12-01
JPS648650B2 JPS648650B2 (enrdf_load_stackoverflow) 1989-02-14

Family

ID=13772352

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8235881A Granted JPS57195753A (en) 1981-05-29 1981-05-29 Batch-wise continuous type vacuum treatment apparatus

Country Status (1)

Country Link
JP (1) JPS57195753A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4763601A (en) * 1987-09-02 1988-08-16 Nippon Steel Corporation Continuous composite coating apparatus for coating strip
JPS6465259A (en) * 1987-09-04 1989-03-10 Nippon Steel Corp Continuous composite coating equipment for band plate

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4763601A (en) * 1987-09-02 1988-08-16 Nippon Steel Corporation Continuous composite coating apparatus for coating strip
EP0305573B1 (en) * 1987-09-03 1993-07-28 Nippon Steel Corporation Continuous composite coating apparatus for coating strip
JPS6465259A (en) * 1987-09-04 1989-03-10 Nippon Steel Corp Continuous composite coating equipment for band plate

Also Published As

Publication number Publication date
JPS648650B2 (enrdf_load_stackoverflow) 1989-02-14

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