JPS57192262A - Spatter apparatus - Google Patents

Spatter apparatus

Info

Publication number
JPS57192262A
JPS57192262A JP7744181A JP7744181A JPS57192262A JP S57192262 A JPS57192262 A JP S57192262A JP 7744181 A JP7744181 A JP 7744181A JP 7744181 A JP7744181 A JP 7744181A JP S57192262 A JPS57192262 A JP S57192262A
Authority
JP
Japan
Prior art keywords
sample
target
film
thickness distribution
film thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7744181A
Other languages
English (en)
Other versions
JPS6352110B2 (ja
Inventor
Satoshi Araihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7744181A priority Critical patent/JPS57192262A/ja
Publication of JPS57192262A publication Critical patent/JPS57192262A/ja
Publication of JPS6352110B2 publication Critical patent/JPS6352110B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP7744181A 1981-05-21 1981-05-21 Spatter apparatus Granted JPS57192262A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7744181A JPS57192262A (en) 1981-05-21 1981-05-21 Spatter apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7744181A JPS57192262A (en) 1981-05-21 1981-05-21 Spatter apparatus

Publications (2)

Publication Number Publication Date
JPS57192262A true JPS57192262A (en) 1982-11-26
JPS6352110B2 JPS6352110B2 (ja) 1988-10-18

Family

ID=13634107

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7744181A Granted JPS57192262A (en) 1981-05-21 1981-05-21 Spatter apparatus

Country Status (1)

Country Link
JP (1) JPS57192262A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5861461U (ja) * 1981-10-19 1983-04-25 富士通株式会社 スパツタリング装置
EP0439361A2 (en) * 1990-01-26 1991-07-31 Varian Associates, Inc. Sputtering apparatus with a rotating magnet array having a geometry for specified target erosion profile

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5560869U (ja) * 1978-10-20 1980-04-25

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5560869U (ja) * 1978-10-20 1980-04-25

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5861461U (ja) * 1981-10-19 1983-04-25 富士通株式会社 スパツタリング装置
EP0439361A2 (en) * 1990-01-26 1991-07-31 Varian Associates, Inc. Sputtering apparatus with a rotating magnet array having a geometry for specified target erosion profile

Also Published As

Publication number Publication date
JPS6352110B2 (ja) 1988-10-18

Similar Documents

Publication Publication Date Title
ES8708093A1 (es) Un aparato para la deposicion en continuo de material de aleacion semiconductora
JPS57192262A (en) Spatter apparatus
JPS57126967A (en) Method for holding mask for film formation
US2451877A (en) Method of manufacturing oscillator plates
JPS57202733A (en) Dry etching device
JPS54127877A (en) Preparation of thin film
JPS5399082A (en) High frequency sputtering apparatus
JPS55128578A (en) Method and apparatus for vacuum deposition plating of metal
JPS56169116A (en) Manufacture of amorphous silicon film
JPS556434A (en) Sputtering apparatus
JPS5726442A (en) Plasma thin film forming device
JPS57156259A (en) Method of hardening surface of printing plate
JPS57113214A (en) Manufacture of amorphous semiconductor film
JPS5789217A (en) Manufacturing device of semiconductor
JPS5591971A (en) Thin film forming method
JPS56105475A (en) Coating apparatus and method of substrate by cathode spattering and use
JPS5538946A (en) Sputtering apparatus
GB1270638A (en) Process and apparatus for the production of alloys
JPS53125760A (en) Manufacture for gas discharging panel
JPS5747869A (en) Vacuum depositing method
JPS55115710A (en) Frequency adjustment method for thickness slide vibrator
JPS5572341A (en) Method for manufacturing storage tube
JPS54103789A (en) Sputtering apparatus
JPS5447879A (en) Metallizing crucible
JPS579872A (en) Evaporation source for sputtering