JPS57189005A - Detector for angle of inclination of plane - Google Patents

Detector for angle of inclination of plane

Info

Publication number
JPS57189005A
JPS57189005A JP7451681A JP7451681A JPS57189005A JP S57189005 A JPS57189005 A JP S57189005A JP 7451681 A JP7451681 A JP 7451681A JP 7451681 A JP7451681 A JP 7451681A JP S57189005 A JPS57189005 A JP S57189005A
Authority
JP
Japan
Prior art keywords
plane
inclination
angle
detecting
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7451681A
Other languages
Japanese (ja)
Inventor
Takao Baba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP7451681A priority Critical patent/JPS57189005A/en
Publication of JPS57189005A publication Critical patent/JPS57189005A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)

Abstract

PURPOSE:To detect the angle and distance of inclination without influence of the surface characteristics of a detecting target plane on the distributions of reflection intensities by detecting the position of the light images on the detecting object surface two-dimensionally by the use of plural pieces of light source. CONSTITUTION:The rays condensed by condenser lenses 7a-7d are irradiated to a detecting object plane 11 by using light sources 6a-6d and the lenses 7a-7d. The rays reflected by the plane 11 are condensed with a photodetecting lens 8 and are detected with a two-dimensional position detector 9. The detector 9 converts the positions of the reflected light images to electric signals by dividing these to two orthogonally intersecting directions and feeds the output signals to a decision processing part 10. The light sources 6a-6d are disposed at every 90 deg. around the photodetecting axis 13, and it is possible to detect the angle and distance of inclination of the plane 11 from the image-forming positions of the respective light beams.
JP7451681A 1981-05-18 1981-05-18 Detector for angle of inclination of plane Pending JPS57189005A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7451681A JPS57189005A (en) 1981-05-18 1981-05-18 Detector for angle of inclination of plane

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7451681A JPS57189005A (en) 1981-05-18 1981-05-18 Detector for angle of inclination of plane

Publications (1)

Publication Number Publication Date
JPS57189005A true JPS57189005A (en) 1982-11-20

Family

ID=13549569

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7451681A Pending JPS57189005A (en) 1981-05-18 1981-05-18 Detector for angle of inclination of plane

Country Status (1)

Country Link
JP (1) JPS57189005A (en)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59171809A (en) * 1983-03-18 1984-09-28 Hitachi Ltd Positioning mechanism
JPS60183511A (en) * 1984-03-01 1985-09-19 Asahi Optical Co Ltd Angle sensor
JPS60205308A (en) * 1984-03-30 1985-10-16 Asahi Optical Co Ltd Angle sensor
JPS61108908A (en) * 1984-10-31 1986-05-27 Asahi Optical Co Ltd Fine inclined angle detector
JPS61155905A (en) * 1984-12-28 1986-07-15 Rikagaku Kenkyusho Distance detector
JPS6332312A (en) * 1986-07-25 1988-02-12 Amutetsuku:Kk Tilt angle measuring instrument
JPS63259409A (en) * 1988-02-25 1988-10-26 Toshiba Corp Detector
JPH01253603A (en) * 1988-04-01 1989-10-09 Topcon Corp Plane-position detector
WO1989010237A1 (en) * 1988-04-19 1989-11-02 Renishaw Plc Apparatus for tracking the surface of a workpiece
JPH02171608A (en) * 1988-12-23 1990-07-03 Toyota Central Res & Dev Lab Inc Distance/angle measuring apparatus
JPH02205707A (en) * 1989-02-03 1990-08-15 Hamamatsu Photonics Kk Distance detecting apparatus
WO1991008861A1 (en) * 1989-12-19 1991-06-27 Fanuc Ltd Noncontact profile controller
JPH05126524A (en) * 1990-10-22 1993-05-21 Internatl Business Mach Corp <Ibm> Optical position determining system
US7800643B2 (en) 2005-06-28 2010-09-21 Fujitsu Limited Image obtaining apparatus
JP2014215141A (en) * 2013-04-25 2014-11-17 株式会社リコー Angle measurement apparatus, adjustment method, and manufacturing method of image forming apparatus
JP2016102667A (en) * 2014-11-27 2016-06-02 三菱電機株式会社 Displacement sensor and displacement measurement device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5476179A (en) * 1977-11-29 1979-06-18 Kawasaki Heavy Ind Ltd Method of optically detecting angle

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5476179A (en) * 1977-11-29 1979-06-18 Kawasaki Heavy Ind Ltd Method of optically detecting angle

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59171809A (en) * 1983-03-18 1984-09-28 Hitachi Ltd Positioning mechanism
JPS60183511A (en) * 1984-03-01 1985-09-19 Asahi Optical Co Ltd Angle sensor
JPS60205308A (en) * 1984-03-30 1985-10-16 Asahi Optical Co Ltd Angle sensor
JPH0464408B2 (en) * 1984-10-31 1992-10-14 Asahi Optical Co Ltd
JPS61108908A (en) * 1984-10-31 1986-05-27 Asahi Optical Co Ltd Fine inclined angle detector
JPS61155905A (en) * 1984-12-28 1986-07-15 Rikagaku Kenkyusho Distance detector
JPS6332312A (en) * 1986-07-25 1988-02-12 Amutetsuku:Kk Tilt angle measuring instrument
JPS63259409A (en) * 1988-02-25 1988-10-26 Toshiba Corp Detector
JPH01253603A (en) * 1988-04-01 1989-10-09 Topcon Corp Plane-position detector
WO1989010237A1 (en) * 1988-04-19 1989-11-02 Renishaw Plc Apparatus for tracking the surface of a workpiece
JPH02171608A (en) * 1988-12-23 1990-07-03 Toyota Central Res & Dev Lab Inc Distance/angle measuring apparatus
JPH02205707A (en) * 1989-02-03 1990-08-15 Hamamatsu Photonics Kk Distance detecting apparatus
WO1991008861A1 (en) * 1989-12-19 1991-06-27 Fanuc Ltd Noncontact profile controller
JPH05126524A (en) * 1990-10-22 1993-05-21 Internatl Business Mach Corp <Ibm> Optical position determining system
US7800643B2 (en) 2005-06-28 2010-09-21 Fujitsu Limited Image obtaining apparatus
JP2014215141A (en) * 2013-04-25 2014-11-17 株式会社リコー Angle measurement apparatus, adjustment method, and manufacturing method of image forming apparatus
JP2016102667A (en) * 2014-11-27 2016-06-02 三菱電機株式会社 Displacement sensor and displacement measurement device

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