JPS6474433A - Particle detecting device - Google Patents

Particle detecting device

Info

Publication number
JPS6474433A
JPS6474433A JP62231819A JP23181987A JPS6474433A JP S6474433 A JPS6474433 A JP S6474433A JP 62231819 A JP62231819 A JP 62231819A JP 23181987 A JP23181987 A JP 23181987A JP S6474433 A JPS6474433 A JP S6474433A
Authority
JP
Japan
Prior art keywords
particle
photodetection
light
detected
area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62231819A
Other languages
Japanese (ja)
Inventor
Shinichi Wakana
Mikio Suetake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62231819A priority Critical patent/JPS6474433A/en
Publication of JPS6474433A publication Critical patent/JPS6474433A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To detect the size and shape of a particle with the same sensitivity by putting an area to be detected in partial charge of photodetection systems and photodetecting scattered light from the particle, and photodetecting respective photodetection signals by amplifiers which differ in amplification factor. CONSTITUTION:A laser light source 11 emits laser beam light l1. The beam light l1 is made incident on a projection optical system 12 and sheet-shaped laser light l2 is projected on the area 16 to be detected where the particle 17 is detected. The photodetection systems 13a-13d such as photoelectric converting elements photodetect the scattered light with the beam light l2 projected on the particle 17 passed through the area 16. A photodetection processing control system 14 which processes the photodetection signals of the scattered light of the particle 17 photodetected by the photodetection systems 13a-13d consists of a control system 41, an adder 42 and plural amplifiers 43a-43d. Then a detection error due to the detection position of the particle 17 and its incident light intensity and scattered light photodetection angle resulting from the expansion of the area 16 is eliminated. Consequently, the size and shape of the particle are detected with the same detection sensitivity.
JP62231819A 1987-09-16 1987-09-16 Particle detecting device Pending JPS6474433A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62231819A JPS6474433A (en) 1987-09-16 1987-09-16 Particle detecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62231819A JPS6474433A (en) 1987-09-16 1987-09-16 Particle detecting device

Publications (1)

Publication Number Publication Date
JPS6474433A true JPS6474433A (en) 1989-03-20

Family

ID=16929514

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62231819A Pending JPS6474433A (en) 1987-09-16 1987-09-16 Particle detecting device

Country Status (1)

Country Link
JP (1) JPS6474433A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010106179A (en) * 2008-10-31 2010-05-13 Toray Ind Inc Method for producing polyarylene sulfide resin
JP2016105043A (en) * 2014-12-01 2016-06-09 三菱電機株式会社 Suspended particle detector
CN108709847A (en) * 2018-06-22 2018-10-26 佛山融芯智感科技有限公司 A kind of air particles detection method and detection device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010106179A (en) * 2008-10-31 2010-05-13 Toray Ind Inc Method for producing polyarylene sulfide resin
JP2016105043A (en) * 2014-12-01 2016-06-09 三菱電機株式会社 Suspended particle detector
CN108709847A (en) * 2018-06-22 2018-10-26 佛山融芯智感科技有限公司 A kind of air particles detection method and detection device

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