JPS57183394A - Method and apparatus for pulling single crystal - Google Patents

Method and apparatus for pulling single crystal

Info

Publication number
JPS57183394A
JPS57183394A JP6794081A JP6794081A JPS57183394A JP S57183394 A JPS57183394 A JP S57183394A JP 6794081 A JP6794081 A JP 6794081A JP 6794081 A JP6794081 A JP 6794081A JP S57183394 A JPS57183394 A JP S57183394A
Authority
JP
Japan
Prior art keywords
heater
single crystal
molten liquid
axis
crucible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6794081A
Other languages
English (en)
Japanese (ja)
Other versions
JPS621356B2 (https=
Inventor
Takashi Mizutani
Koji Tada
Hideki Mori
Sukehisa Kawasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp, Sumitomo Electric Industries Ltd filed Critical Nippon Telegraph and Telephone Corp
Priority to JP6794081A priority Critical patent/JPS57183394A/ja
Publication of JPS57183394A publication Critical patent/JPS57183394A/ja
Publication of JPS621356B2 publication Critical patent/JPS621356B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP6794081A 1981-05-06 1981-05-06 Method and apparatus for pulling single crystal Granted JPS57183394A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6794081A JPS57183394A (en) 1981-05-06 1981-05-06 Method and apparatus for pulling single crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6794081A JPS57183394A (en) 1981-05-06 1981-05-06 Method and apparatus for pulling single crystal

Publications (2)

Publication Number Publication Date
JPS57183394A true JPS57183394A (en) 1982-11-11
JPS621356B2 JPS621356B2 (https=) 1987-01-13

Family

ID=13359426

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6794081A Granted JPS57183394A (en) 1981-05-06 1981-05-06 Method and apparatus for pulling single crystal

Country Status (1)

Country Link
JP (1) JPS57183394A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60122793A (ja) * 1983-12-05 1985-07-01 Toshiba Corp 化合物半導体単結晶育成装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS549174A (en) * 1977-06-24 1979-01-23 Toshiba Corp Method of producing seingle crystal
JPS5481180A (en) * 1977-12-13 1979-06-28 Nec Corp Growth of single crystal

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS549174A (en) * 1977-06-24 1979-01-23 Toshiba Corp Method of producing seingle crystal
JPS5481180A (en) * 1977-12-13 1979-06-28 Nec Corp Growth of single crystal

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60122793A (ja) * 1983-12-05 1985-07-01 Toshiba Corp 化合物半導体単結晶育成装置

Also Published As

Publication number Publication date
JPS621356B2 (https=) 1987-01-13

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