JPS621356B2 - - Google Patents

Info

Publication number
JPS621356B2
JPS621356B2 JP56067940A JP6794081A JPS621356B2 JP S621356 B2 JPS621356 B2 JP S621356B2 JP 56067940 A JP56067940 A JP 56067940A JP 6794081 A JP6794081 A JP 6794081A JP S621356 B2 JPS621356 B2 JP S621356B2
Authority
JP
Japan
Prior art keywords
heater
pulling
single crystal
diameter
temperature distribution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56067940A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57183394A (en
Inventor
Takashi Mizutani
Koji Tada
Hideki Mori
Akihisa Kawasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp, Sumitomo Electric Industries Ltd filed Critical Nippon Telegraph and Telephone Corp
Priority to JP6794081A priority Critical patent/JPS57183394A/ja
Publication of JPS57183394A publication Critical patent/JPS57183394A/ja
Publication of JPS621356B2 publication Critical patent/JPS621356B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP6794081A 1981-05-06 1981-05-06 Method and apparatus for pulling single crystal Granted JPS57183394A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6794081A JPS57183394A (en) 1981-05-06 1981-05-06 Method and apparatus for pulling single crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6794081A JPS57183394A (en) 1981-05-06 1981-05-06 Method and apparatus for pulling single crystal

Publications (2)

Publication Number Publication Date
JPS57183394A JPS57183394A (en) 1982-11-11
JPS621356B2 true JPS621356B2 (https=) 1987-01-13

Family

ID=13359426

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6794081A Granted JPS57183394A (en) 1981-05-06 1981-05-06 Method and apparatus for pulling single crystal

Country Status (1)

Country Link
JP (1) JPS57183394A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60122793A (ja) * 1983-12-05 1985-07-01 Toshiba Corp 化合物半導体単結晶育成装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5825078B2 (ja) * 1977-06-24 1983-05-25 株式会社東芝 単結晶の製造方法
JPS5481180A (en) * 1977-12-13 1979-06-28 Nec Corp Growth of single crystal

Also Published As

Publication number Publication date
JPS57183394A (en) 1982-11-11

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