JPS57174454A - Production of photoconductive member - Google Patents
Production of photoconductive memberInfo
- Publication number
- JPS57174454A JPS57174454A JP56060157A JP6015781A JPS57174454A JP S57174454 A JPS57174454 A JP S57174454A JP 56060157 A JP56060157 A JP 56060157A JP 6015781 A JP6015781 A JP 6015781A JP S57174454 A JPS57174454 A JP S57174454A
- Authority
- JP
- Japan
- Prior art keywords
- compds
- formula
- carbon atoms
- raw material
- kinds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 125000004432 carbon atom Chemical group C* 0.000 abstract 3
- 239000000463 material Substances 0.000 abstract 3
- 239000002994 raw material Substances 0.000 abstract 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 abstract 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 2
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 abstract 2
- 230000015572 biosynthetic process Effects 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 229910007260 Si2F6 Inorganic materials 0.000 abstract 1
- 229910003910 SiCl4 Inorganic materials 0.000 abstract 1
- 229910004014 SiF4 Inorganic materials 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 229910021529 ammonia Inorganic materials 0.000 abstract 1
- 125000004429 atom Chemical group 0.000 abstract 1
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 125000005843 halogen group Chemical group 0.000 abstract 1
- 229910052757 nitrogen Inorganic materials 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 abstract 1
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 abstract 1
- SDNBGJALFMSQER-UHFFFAOYSA-N trifluoro(trifluorosilyl)silane Chemical compound F[Si](F)(F)[Si](F)(F)F SDNBGJALFMSQER-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Chemical Vapour Deposition (AREA)
- Light Receiving Elements (AREA)
- Photoreceptors In Electrophotography (AREA)
- Photovoltaic Devices (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56060157A JPS57174454A (en) | 1981-04-21 | 1981-04-21 | Production of photoconductive member |
| US06/354,898 US4468443A (en) | 1981-03-12 | 1982-03-04 | Process for producing photoconductive member from gaseous silicon compounds |
| DE19823209055 DE3209055A1 (de) | 1981-03-12 | 1982-03-12 | Verfahren zur herstellung eines fotoleitfaehigen elements |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56060157A JPS57174454A (en) | 1981-04-21 | 1981-04-21 | Production of photoconductive member |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57174454A true JPS57174454A (en) | 1982-10-27 |
| JPS635469B2 JPS635469B2 (enrdf_load_stackoverflow) | 1988-02-03 |
Family
ID=13134028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56060157A Granted JPS57174454A (en) | 1981-03-12 | 1981-04-21 | Production of photoconductive member |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57174454A (enrdf_load_stackoverflow) |
-
1981
- 1981-04-21 JP JP56060157A patent/JPS57174454A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS635469B2 (enrdf_load_stackoverflow) | 1988-02-03 |
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