JPS57165030A - Preparation of ultrafine particle - Google Patents

Preparation of ultrafine particle

Info

Publication number
JPS57165030A
JPS57165030A JP5063581A JP5063581A JPS57165030A JP S57165030 A JPS57165030 A JP S57165030A JP 5063581 A JP5063581 A JP 5063581A JP 5063581 A JP5063581 A JP 5063581A JP S57165030 A JPS57165030 A JP S57165030A
Authority
JP
Japan
Prior art keywords
ultrafine particle
evaporation source
temp
size range
heating part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5063581A
Other languages
Japanese (ja)
Inventor
Susumu Kasukabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5063581A priority Critical patent/JPS57165030A/en
Publication of JPS57165030A publication Critical patent/JPS57165030A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To prepare the ultrafine particle in good reproducibility having a narrow particle size range and uniform croystal prperty by appropriately moving the heating part of an evaporation source.
CONSTITUTION: In preparing the ultrafine particle by evaporating a material in an inert gas atmosphere, the heating part of an evaporation source such as a tungsten filament 18 or the like is moved on a support column 14 through a filament support plate 16 corresponding to the temp. of the evaporation source or an evaporation amount. By this mechanism, distributions of a vapor supersaturation degree and a vapor temp. are enabled to be approached to a constant condition and the metal ultrafine particle with a narrow particle size range and crystal property can be prepared.
COPYRIGHT: (C)1982,JPO&Japio
JP5063581A 1981-04-06 1981-04-06 Preparation of ultrafine particle Pending JPS57165030A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5063581A JPS57165030A (en) 1981-04-06 1981-04-06 Preparation of ultrafine particle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5063581A JPS57165030A (en) 1981-04-06 1981-04-06 Preparation of ultrafine particle

Publications (1)

Publication Number Publication Date
JPS57165030A true JPS57165030A (en) 1982-10-09

Family

ID=12864413

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5063581A Pending JPS57165030A (en) 1981-04-06 1981-04-06 Preparation of ultrafine particle

Country Status (1)

Country Link
JP (1) JPS57165030A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02265643A (en) * 1989-04-04 1990-10-30 Res Dev Corp Of Japan Manufacture of ultrafine particles and its device
JPH0389938A (en) * 1989-08-31 1991-04-15 Res Dev Corp Of Japan Preparation of ultrafine particle

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02265643A (en) * 1989-04-04 1990-10-30 Res Dev Corp Of Japan Manufacture of ultrafine particles and its device
JPH0389938A (en) * 1989-08-31 1991-04-15 Res Dev Corp Of Japan Preparation of ultrafine particle

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