JPS57160134A - Pellet bonding apparatus - Google Patents

Pellet bonding apparatus

Info

Publication number
JPS57160134A
JPS57160134A JP56044737A JP4473781A JPS57160134A JP S57160134 A JPS57160134 A JP S57160134A JP 56044737 A JP56044737 A JP 56044737A JP 4473781 A JP4473781 A JP 4473781A JP S57160134 A JPS57160134 A JP S57160134A
Authority
JP
Japan
Prior art keywords
pellet
fixed
semiconductor
rotary bed
lead frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56044737A
Other languages
Japanese (ja)
Other versions
JPH0217936B2 (en
Inventor
Nobuhito Yamazaki
Takeshi Hasegawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinkawa Ltd
Original Assignee
Shinkawa Ltd
Shinkawa Seisakusho Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinkawa Ltd, Shinkawa Seisakusho Co Ltd filed Critical Shinkawa Ltd
Priority to JP56044737A priority Critical patent/JPS57160134A/en
Publication of JPS57160134A publication Critical patent/JPS57160134A/en
Publication of JPH0217936B2 publication Critical patent/JPH0217936B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/75Apparatus for connecting with bump connectors or layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8319Arrangement of the layer connectors prior to mounting
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/838Bonding techniques
    • H01L2224/8385Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01033Arsenic [As]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01039Yttrium [Y]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01082Lead [Pb]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/06Polymers
    • H01L2924/078Adhesive characteristics other than chemical
    • H01L2924/07802Adhesive characteristics other than chemical not being an ohmic electrical conductor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/156Material
    • H01L2924/15786Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
    • H01L2924/15787Ceramics, e.g. crystalline carbides, nitrides or oxides

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Die Bonding (AREA)

Abstract

PURPOSE:To improve the precision of bonding of semiconductor pellet to a lead frame while preventing breakdown of the pellet, by attaching a rotary bed to an X-Y table carrying the semiconductor pellet and detecting and aligning the pellet by means of a detection camera. CONSTITUTION:A bond sheet 14 to which a semiconductor pellet 13 is bonded is set on an X-Y table 12. The X-Y table 12 is fixed to a rotary bed 11 fixed to a base 10 and is fed at a predetermined pitch. As the semiconductor pellet 13 takes a position just under a detection camera 15, the camera 15 discriminates whether the pellet 13 is acceptable or not. If the pellet 13 is unacceptable, the rotary bed 11 and the X-Y table are driven to correct the posture and position of the pellet 13. Subsequently, a bonding head unit 19 is driven to permit a vacuum sucking collet 20 on the end of an arm 21 to attract and hold the pellet 13. The pellet 13 is then transferred and fixed to a lead frame 18.
JP56044737A 1981-03-28 1981-03-28 Pellet bonding apparatus Granted JPS57160134A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56044737A JPS57160134A (en) 1981-03-28 1981-03-28 Pellet bonding apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56044737A JPS57160134A (en) 1981-03-28 1981-03-28 Pellet bonding apparatus

Publications (2)

Publication Number Publication Date
JPS57160134A true JPS57160134A (en) 1982-10-02
JPH0217936B2 JPH0217936B2 (en) 1990-04-24

Family

ID=12699753

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56044737A Granted JPS57160134A (en) 1981-03-28 1981-03-28 Pellet bonding apparatus

Country Status (1)

Country Link
JP (1) JPS57160134A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51131274A (en) * 1975-05-10 1976-11-15 Fujitsu Ltd Tip bonding method
JPS54158874A (en) * 1978-06-06 1979-12-15 Matsushita Electronics Corp Dies bonding unit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51131274A (en) * 1975-05-10 1976-11-15 Fujitsu Ltd Tip bonding method
JPS54158874A (en) * 1978-06-06 1979-12-15 Matsushita Electronics Corp Dies bonding unit

Also Published As

Publication number Publication date
JPH0217936B2 (en) 1990-04-24

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